摘要
Three-dimensional(3D)nanoprinting via two-photon polymerization offers unparalleled design flexibility and precision,thereby enabling rapid prototyping of advanced micro-optical elements and systems that have found important applications in endomicroscopy and biomedical imaging.The potential of this versatile tool for monolithic manufacturing of dynamic micro-opto-electro-mechanical systems(MOEMSs),however,has not yet been sufficiently explored.This work introduces a 3D-nanoprinted lens actuator with a large optical aperture,optimized for remote focusing in miniaturized imaging systems.The device integrates orthoplanar linear motion springs,a self-aligned sintered micro-magnet,and a monolithic lens,actuated by dual microcoils for uniaxial motion.The use of 3D nanoprinting allows complete design freedom for the integrated optical lens,whereas the monolithic fabrication ensures inherent alignment of the lens with the mechanical elements.With a lens diameter of 1.4 mm and a compact footprint of 5.74 mm,it achieves high mechanical robustness at resonant frequencies exceeding 300 Hz while still providing a large displacement range of 200μm(±100μm).A comprehensive analysis of optical and mechanical performance,including the effects of coil temperature and polymer viscoelasticity,demonstrates its advantages over conventional micro-electro-mechanical system actuators,showcasing its potential for next-generation imaging applications.
作者简介
correspondence:Florian Lux received his bachelor’s and master’s degrees in microsystem engineering with a focus on photonics and biomedical engineering from University of Freiburg,Germany,in 2020 and 2022,respectively.He is currently part of the Microsystems for Biomedical Imaging Group where his research focuses on microscopes,florian,lux@imtek.uni-freiburg.de;Aybuke Calikoglu received her bachelor’s degree in electrical and electronics engineering from Bogaziçi University,Turkey,in 2016,followed by her master’s degree in the same field in 2019.She is currently pursuing her doctorate degree in the Laboratory for Micro-Optics at the University of Freiburg.Her research focuses on utilizing 3D nanoprinting techniques to fabricate optics and novel optical-MEMS devices;Çağlar Ataman received his PhD in electrical engineering from KoçUniversity,Turkey,in 2008,and worked as a postdoctoral researcher at theÉcole Polytechnique Fédérale de Lausanne,Switzerland,between 2008 and 2012.From 2012 to 2021,he was a senior scientist in the Department of Microsystems Engineering at the University of Freiburg,where he has been an assistant professor since 2021,leading the Micro-systems for Biomedical Imaging Group.
