摘要
扫描电子显微镜(SEM)是材料形貌微观分析常用的测试仪器,在SEM图像分析中样品的制样方法直接影响图像的分辨率。本文将SEM样品分为导电和不导电、粉状和块状两类。分析对比了粉状不导电样品直接牙签抖落涂抹、导电碳胶反复粘贴和溶液分散后滴涂在硅基底上三种制样方法对SEM图像性能的影响;比较了镶嵌类块状导电样品通过导电碳胶直接黏合在电镜台上、直接黏合的基础上样品表面再加固两条导电碳胶和使用本试验自制的块状样品夹具三种方法对SEM成像的影响。结果表明:粉末状样品通过溶液分散再滴涂到硅片上所制备的样品表面光滑清洁、背景干净,SEM图像效果最佳;而镶嵌类型固体样品,使用本实验自制的夹具固定可削弱样品的漂移现象,改善SEM图像分辨率。本文总结了适用不同观察目的的SEM样品制备方式和注意事项,以期为科研工作者获得高分辨率的SEM图像提供实验指导和技术支持。
The scanning electron microscope(SEM)is a commonly used instrument for the microscopic analysis of material morphology.The sample preparation method directly affects the resolution of SEM images.SEM samples were classified into two categories:conductive and non-conductive,powdery and block.The impact of three sample preparation methods on SEM image performance was analyzed and compared:direct smearing with a toothpick for powdery nonconductive samples,repeated sticking with conductive carbon glue,and dispersion dropping on a silicon substrate after solution dispersion.Furthermore,the effects of three methods on SEM imaging for block-shaped conductive samples were compared:bonding directly with conductive carbon glue on the electron microscope stage,post-bonding reinforcement with two conductive carbon glues on the sample surface,and using a self-made block sample fixture in this experiment.The results indicated that powdery samples prepared by solution dispersion followed by dropping on a silicon wafer exhibited a smooth and clean surface,with the best SEM image quality.In contrast,for embedded solid samples,the use of the self-made fixture can reduce sample drift and enhance the SEM image resolution.SEM sample preparation methods and precautions tailored to different observation purposes were summarized,aiming to provide experimental guidance and technical support for researchers to achieve high-resolution SEM images.
作者
叶韫
杨亿斌
殷陶
李海霞
孙志鹏
招瑜
陶丽丽
YE Yun;YANG Yibin;YIN Tao;LI Haixia;SUN Zhipeng;ZHAO Yu;TAO Lili(School of Materials and Energy,Guangdong University of Technology,Guangdong Guangzhou 510006,China)
出处
《广州化工》
2025年第15期82-86,共5页
GuangZhou Chemical Industry
基金
广东省自然科学基金-面上项目(2024A1515011219)
国家自然科学基金-面上项目(52273104)。
关键词
扫描电子显微镜
微观分析
制样方法
分辨率
scanning electron microscope
microscopic analysis
sample preparation methods
resolution
作者简介
叶韫(2000-),女,研究生,主要研究方向为光学材料;通讯作者:李海霞(1986-),女,博士,实验师。
