摘要
巨量转移设备在高速、高频运行工况下将产生大量的热,导致零部件热变形,严重影响巨量转移工艺的精度。对巨量转移设备的热误差进行合理建模,并实现热误差补偿对保障转移精度非常关键。文章介绍设备高速进给机构的热误差补偿技术研究进展,从高速机构热特性分析与建模、热误差建模技术、高速进给机构热误差建模与补偿等方面对国内外研究现状进行总结。首先介绍了直线运动机构热特性,其次系统阐述了热误差建模过程中温度测量、热误差测量、温度测点优化选取、热误差建模方法,最后对巨量转移设备热误差补偿研究进行总结与展望,为相关的技术研究提供借鉴和参考。
The operation of mass transfer equipment at high speeds and frequencies results in the generation of significant heat,which can lead to thermal deformation of components and,consequently,a notable decline in the precision of the mass transfer process.It is of great importance to develop a reasonable model of the thermal error of mass transfer equipment and to implement a thermal error compensation strategy in order to guarantee the transfer precision.This paper presents the research progress on thermal error compensation technology for high-speed feeding mechanisms.It provides an overview of the current research landscape,both domestically and internationally,with a focus on three key areas:thermal characteristic analysis and modelling of high-speed mechanisms,thermal error modelling technology,and thermal error modelling and compensation of high-speed feeding mechanisms.Firstly,the thermal characteristics of linear motion mechanisms are introduced.Secondly,the temperature measurement,thermal error measurement,optimal selection of temperature measurement points,and thermal error modelling method in the process of thermal error modelling are systematically elaborated.Finally,the research on thermal error compensation of mass transfer equipment is summarized and outlooked to provide reference for related technical research.
作者
刘正勇
陈友东
张鹏举
王广炎
薛芮
韩江
LIU Zhengyong;CHEN Youdong;ZHANG Pengju;WANG Guangyan;XUE Rui;HAN Jiang(School of Mechanical Engineering and Automation,Beihang University,Beijing 100191,China;Hefei Sineva Intelligent Machine Co.,Ltd.,Hefei 230013,China;School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China)
出处
《合肥工业大学学报(自然科学版)》
北大核心
2025年第7期889-897,共9页
Journal of Hefei University of Technology:Natural Science
基金
国家重点研发计划资助项目(2022YFB4702100)
安徽省科技重大专项资助项目(2021d0505001)。
关键词
巨量转移设备
高速进给机构
直线电机
热误差机理
热误差补偿
mass transfer equipment
high-speed feeding mechanism
linear motor
thermal error mechanism
thermal error compensation
作者简介
刘正勇(1982-),男,湖南株洲人,北京航空航天大学博士生;通信作者:陈友东(1973-),男,安徽合肥人,博士,北京航空航天大学教授,博士生导师,E-mail:chenyd@buaa.edu.cn;韩江(1963-),男,河南洛阳人,博士,合肥工业大学教授,博士生导师.
