摘要
为了解决光学元件在连续激光辐照下的实时损伤不易判别问题,根据表面热透镜效应提出了一种新的基于四象限探测器的连续激光损伤实时判别方法。根据SPIE国际激光损伤竞赛的相关标准,搭建了波长915 nm,聚焦光斑φ0.8 mm的连续激光损伤测试系统。通过对四象限探测器产生剧烈变化的时刻进行捕捉,可以有效地判别样片是否发生损伤。同时,以硅片为例进行了连续激光损伤测试,并将测试结果与传统非实时的图像法进行了对比。研究结果表明:以恒定功率35 W辐照硅片18 s后,辐照点产生损伤的同时探测器信号出现剧烈变化;当以40 W激光辐照时,12 s后发生损伤同时产生同样剧烈变化。与传统非实时图像法相比,该方法能够在激光辐照过程中进行损伤判别,避免不必要的长时间照射,单次测试效率提升25%~80%,且误判率小于5%,可以为连续激光损伤阈值在线测试系统的实时判别提供理论依据及方法指导。
It is difficult to identify the real-time damage of optical components under continuous laser irradiation.To solve this problem,the paper presents a novel method for real-time identification of continuous laser damage based on a four-quadrant detector according to the surface thermal lens effect.By the relevant standards of the SPIE International Laser Damage Competition,a continuous laser damage testing system with a wavelength of 915 nm and a focal spot ofφ0.8 mm was built.By capturing the moment when the four-quadrant detector produces drastic changes,it is possible to effectively determine whether the sample has been damaged.A continuous laser damage test was conducted on a silicon wafer as an example,and the test results were compared with those obtained by traditional non-real-time image methods.The research results show that after the silicon wafer was irradiated with a constant power of 35 W for 18 s,the damage occurred at the irradiated point and the detector signal undergone significant changes;when the silicon wafer was irradiated with a 40 W laser for12 s,the damage and the same drastic changes occurred.Compared with traditional non-real-time image methods,this method can identify damage during laser irradiation,avoiding unnecessary prolonged irradiation.The efficiency of a single test is improved by 25%~80%,with the misjudgment rate less than 5%.This study can provide a theoretical basis and practical guidance for the real-time identification of the continuous laser damage threshold online testing system.
作者
赵海阳
曹宏基
屈世鑫
吴慎将
ZHAO Haiyang;CAO Hongji;QU Shixin;WU Shenjiang(School of Opto-electronical Engineering,Xi’an Technological University,Xi’an 710021,China)
出处
《西安工业大学学报》
2025年第3期430-440,467,共12页
Journal of Xi’an Technological University
基金
瞬态化学效应与控制全国重点实验室项目(WDYX21614260202)
陕西省自然科学基础研究计划项目(2023-JC-QN-0723)
西安市碑林区科技计划项目(GX2313)。
关键词
连续激光
损伤判别
损伤阈值
表面热透镜
四象限探测器
continuous laser
damage identification
damage threshold
surface thermal lens
four quadrant detector
作者简介
吴慎将(1979-),男,教授,主要研究方向为光电成像和光电探测,E-mail:bxait@xatu.edu.cn.
