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基于纳米多孔碳的柔性温度传感器

Flexible temperature sensor based on nanoporous carbon
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摘要 柔性温度传感器由于其灵活、薄、轻等优点而引起了人们越来越多的兴趣,是柔性电子发展的必然趋势。以纳米多孔碳(NP-C)为温敏材料,采用滴涂法将温敏浆料涂覆在电极上制备出柔性电阻型温度传感器,该传感器的温敏单元大小仅0.1 cm^(2)。通过扫描电子显微镜(SEM)、X射线衍射(XRD)、拉曼光谱和X射线光电子能谱分析对NP-C的形貌、结构和组成进行了表征,并搭建平台对传感器进行温敏性能测试。结果表明:该传感器的测温范围宽达-50~100℃,呈负温度系数,在20~80℃内,传感器的线性度超过0.9907,灵敏度高达0.6112%/℃;80℃时,该传感器的响应/恢复时间仅需10.1 s/16.4 s,且迟滞性小,稳定性良好。该成果在可穿戴电子产品、机器人技术等领域具有较大的应用潜力。 The flexible temperature sensors have gained a growing interest due to their advantage of flexibility,thinness and lightness,which makes an inevitable trend in the development of flexible electronics.A flexible resistive temperature sensor is fabricated using nanoporous carbon(NP-C)as temperature sensitive material,flexible resistive type temperature sensor is prepared by coating temperature sensitive slurry on electrode via drop-coating method.And the size of the temperature-sensitive unit of the sensor is only 0.1 cm^(2).Through scanning electron microscopy(SEM),X-ray diffraction(XRD),Raman spectroscopy and X-ray photoelectron spectroscopy,characterizations of morphology,structure and composition of the NP-C are conducted and a platform is built to test the thermosensitive performance of sensor.The results indicate that the temperature measurement range of the sensor is-50~100℃,exhibiting a negative temperature coefficient.Within the range of 20~80℃,the linearity of the sensor exceeds 0.9907 and the sensitivity is 0.6112%/℃.At 80℃,the sensor response/recovery time is only 10.1 s and 16.4 s,while the sensor has little hysteresis and good stability.This achievement has great application potential in wearable electronic products,robotics,and other fields.
作者 陈学敏 吴洁鑫 彭华超 詹云凤 唐秀凤 罗坚义 CHEN Xuemin;WU Jiexin;PENG Huachao;ZHAN Yunfeng;TANG Xiufeng;LUO Jianyi(School of Applied Physics and Materials,Wuyi University,Jiangmen 529020,China;Research Center of Flexible Sensing Materials and Devices,Wuyi University,Jiangmen 529020,China)
出处 《传感器与微系统》 北大核心 2025年第6期122-127,共6页 Transducer and Microsystem Technologies
基金 广东省基础与应用基础研究基金区域联合基金-青年基金资助项目(2019A1515110778) 五邑大学创新创业基金资助项目(2022CX33,2023CX21) 2022年广东大学生科技创新培养专项资金“攀登计划”项目(pdjh2022a0522,pdjh2022a0524)。
关键词 柔性温度传感器 纳米多孔碳 高灵敏度 温敏特性 flexible temperature sensor NP-C high sensitivity temperature sensitive characteristics
作者简介 陈学敏(1998-),男,硕士研究生,研究方向为柔性传感器材料与器件;通讯作者:詹云凤(1990-),女,博士,讲师,主要研究领域为碳基传感材料与器件、新能源材料与器件。
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