摘要
正电子亲和势钾铯锑光电阴极具有驱动激光波长较长(532 nm)、量子效率高、长寿命、响应时间快等优点,在电子源领域具有广阔的应用潜力,但受限于材料本身的光电特性,有效的输运距离很短,不足以吸收所有入射光的驱动激光能量,进而量子效率也受到影响。因此本文将法布里-珀罗腔结构引入到光电阴极中,来提高入射驱动激光的有效吸收,通过时域有限差分方法展开仿真研究,使其有源层钾铯锑光吸收达到90%,并对其反射层银和介质层氮化硅进行实验制备与验证,同时通过文献实验拟合,预测了其量子效率为11.17%,来满足未来高亮度、高重频电子源的要求。
The positive electron affinity potassium cesium antimony photocathode has driving laser wavelength is longer(532 nm),high quantum efficiency,long life,fast response time,in the field of electronic source has broad application potential,but limited by the photoelectric characteristics of the material itself,effective transport distance is very short,not enough to absorb all the incident light driven laser energy,and quantum efficiency is also affected.Therefore,this article introduced the Fabry-Perot cavity structure into the photocathode,to improve the effective absorption of incident driven laser,through the time domain finite difference method simulation study,make the active layer potassium cesium antimony light absorption reached 90%,and the reflective layer silver and dielectric layer silicon nitride were prepared and verified,predicted the quantum efficiency is 11.17%,to meet the requirements of high brightness,high frequency electron source in the future.
作者
王玉
彭新村
邹继军
邓文娟
江霖霖
Wang Yu;Peng Xincun;Zou Jijun;Deng Wenjuan;Jiang Linlin(Engineering Research Center of Nuclear Technology Application,Ministry of Education,East China University of Technology,Nanchang 330013,China)
出处
《电子测量技术》
北大核心
2025年第9期27-35,共9页
Electronic Measurement Technology
基金
国家自然科学基金(12375158,62061001,61961001)
江西省自然科学基金(20232ACB202004)
江西省重点研发计划资助项目(20223BBH80005)资助。
作者简介
王玉,硕士研究生,主要研究方向为半导体制造。E-mail:3217204750@qq.com;通信作者:彭新村,副教授,主要研究方向为半导体制造。E-mail:xcpeng@ecit.cn。
