摘要
侧向蚀刻反应是限制蚀刻型金属引线框架产品迭代升级的关键因素之一,减弱或消除侧向蚀刻反应是蚀刻工程师、设备制造商以及药水开发商共同面对的挑战。将铜缓蚀剂作为一种防侧蚀剂加入到酸性氯化铜蚀刻液中,基于防侧蚀剂的原理,通过静态与动态蚀刻试验筛选出有效的防侧蚀剂及其使用浓度,最后使用一款引线框架产品验证了防侧蚀剂对蚀刻尺寸均匀性的提升效果。为金属引线框架行业中蚀刻制程的改善提升提供了一种可行的方法,同时弥补了防侧蚀剂在金属引线框架行业中研究的空白。
Undercut is one of the key factors limiting the iterative upgrading of etched metal lead frames,and attenuating or eliminating the undercut is a common challenge faced by etch engineers,equipment manufacturers,and potion developers.Copper corrosion inhibitors as an anti-undercut additive were added to the acidic copper chloride etchant.Based on the principle of anti-undercut additive,the effective anti-undercut additive and its use of the concentration were screened out through the static and dynamic etching experiments.Finally,a kind of lead-frame product was used to verify the improvement effect of anti-undercut additive on the uniformity of etching size.It provides a feasible method for the improvement and enhancement of the etching process in the metal lead frame industry,and at the same time fills the research gap of anti-side-etching agents in the metal lead frame industry.
作者
张德良
朱林
周立强
杨永学
ZHANG Deliang;ZHU Lin;ZHOU Liqiang;YANG Yongxue(Henghui Technology Co.,Ltd.,Zibo 255000,Shandong,China)
出处
《金属功能材料》
2025年第2期105-110,共6页
Metallic Functional Materials
基金
物联网eSIM封装技术研发及产业化。
作者简介
张德良(1995-),男,博士,工程师,E-mail:zhangdeliang@henghuiic.com;通信作者:朱林(1976-),男,硕士,高级工程师,E-mail:zl@henghuiic.com。
