摘要
超高纯度(UHP)AISI 316L奥氏体不锈钢是半导体设备部件的关键材料,采用真空感应熔炼(VIM)加真空自耗重熔(VAR)工艺生产的材料称为A料,采用氩氧脱碳炉(AOD)加VAR工艺生产的材料称为B料。为了寻找国内生产与进口的超高纯316L不锈钢的质量差距,选取了不同厂商生产的8种超高纯316L不锈钢A料和B料,采用金相显微镜、扫描电子显微镜及配套能谱、Thermo-Calc热力学软件开展了夹杂物解析。结果表明,国内甲厂B料夹杂物密度和面积分数最小,洁净度最高,其次为国内甲厂A料、日本进口A料、日本进口B料以及国内乙厂A料;国内甲厂夹杂物控制水平达到国际先进水平,采用稀土Ce改质夹杂物,夹杂物主要为Ce_(2)S_(3)以及Ce_(2)O_(2)S,日本进口A料和国内丙厂A料夹杂物主要为Al_(2)O_(3),美国进口A料较高的Mn含量导致夹杂物主要为MnO·Al_(2)O_(3)和MnS,国内乙厂A料与日本进口B料采用Mg改质处理,因此夹杂物主要为MgO·Al_(2)O_(3)和Al_(2)O_(3),国内乙厂B料夹杂物主要为大尺寸的Cr_(2)O_(3)和Al_(2)O_(3)。Thermo-Calc 2020b计算冷却过程中夹杂物演变结果与试验结果基本吻合。
Ultra-high purity(UHP)AISI 316L austenitic stainless steel is a key material for semiconductor equipment components.Material produced through the vacuum induction melting(VIM)followed by vacuum arc remelting(VAR)process is referred to as Material A,while material produced through the argon oxygen decarburization(AOD)followed by VAR process is referred to as Material B.In order to investigate the quality gap between domestically produced and imported ultra-high purity 316L stainless steel,eight types of ultra-high purity 316L stainless steel A and B materials from different manufacturers were selected.The inclusion analysis was carried out using metallographic microscopy,scanning electron microscopy(SEM)with accompanying energy dispersive spectroscopy(EDS),and Thermo-Calc thermodynamic software.The results show that Material B from Domestic Manufacturer A has the lowest inclusion density and area fraction,indicating the highest cleanliness,followed by Material A from Domestic Manufacturer A,Material A imported from Japan,Material B imported from Japan,and Material A from Domestic Manufacturer B.The inclusion control level of Domestic Manufacturer A has reached international advanced standards,employing rare earth Ce-modified inclusions,primarily Ce_(2)S_(3)and Ce_(2)O_(2)S.Inclusions in Material A from Japan and Material A from Domestic Manufacturer C consist of Al_(2)O_(3).The high Mn content in Material A imported from the United States results in inclusions of MnO·Al_(2)O_(3)and MnS.Both Material A from Domestic Manufacturer B and Material B imported from Japan undergo Mg modification treatment,leading to inclusions mainly composed of MgO·Al_(2)O_(3)and Al_(2)O_(3).Inclusions in Material B from Domestic Manufacturer B are large-sized Cr_(2)O_(3)and Al_(2)O_(3).The Thermo-Calc 2020b calculations for inclusion evolution during cooling are in good agreement with the experimental results.
作者
高占江
翁建寅
骆辉
罗学武
徐翔宇
付建勋
GAO Zhanjiang;WENG Jianyin;LUO Hui;LUO Xuewu;XU Xiangyu;FU Jianxun(Center for Advanced Solidification Technology(CAST)of School of Materials Science and Engineering,Shanghai University,Shanghai 200444,China;Guoxin Ultrahigh-Purity(Jiangsu)Materials Co.,Ltd.,Suzhou 215699,Jiangsu,China;Pressure Vessel Department,China Special Equipment Inspection and Research Institute,Beijing 100029,China;Shanghai Baitu Cryogenic Valve Co.,Ltd.,Shanghai 200949,China)
出处
《中国冶金》
北大核心
2025年第2期23-35,共13页
China Metallurgy
基金
国家自然科学基金资助项目(52104335)。
关键词
超高纯316L不锈钢
夹杂物
VAR
成分
洁净度
ultra-high purity 316L stainless steel
inclusion
VAR
composition
cleanliness
作者简介
高占江(2001-),男,硕士生,E-mail:shugaozj@shu.edu.cn;通信作者:徐翔宇(1989-),男,博士,副研究员,E-mail:xuxiangyu@shu.edu,cn。
