摘要
水文提出用圆环测试结构和双传输线模型确定金属-半导体欧姆接触的比接触电阻ρ_C值。考虑了金属电阻值不为零和合金化后金属接触下方半导体电阻率的改变对确定比接触电阻值的影响,导出了计算比接触电阻值的公式。用提出的方法对实验样品进行测量和计算,并将结果与文献中报道的方法所得结果作了比较。
Four-Circular structure and double transmission line model have been developed to determine the specific contact resistance of metal-semiconductor ohmic contact. The effects of non-zero metal resistance aad modification of the resistivity of semiconductor under the metal contact after metalization oa the determination of specific contact resistance have been considered. The formulae for specific contact resistance were derived. Measurements and calculations have been carried out by using the developed method and the results were compared with that of publications.
出处
《固体电子学研究与进展》
CAS
1987年第2期157-163,共7页
Research & Progress of SSE
