摘要
被誉为终极半导体材料的金刚石具有超宽的禁带宽度、超高击穿电场、高的载流子漂移速率、极高的热导率、极强的抗辐射能力等特性,在微波功率器件领域具有很好的应用前景。金刚石微波功率器件的研究近几年引起了广泛关注,文章总结了金刚石微波功率器件的研究进展,重点分析了目前主流的氢终端金刚石、表面氧化物终端金刚石和掺杂金刚石实现的微波功率器件的研究进展、面临问题和发展展望。
Known as the ultimate semiconductor material,diamond has excellent application prospects in microwave power devices due to its ultra-wide bandgap,ultra-high breakdown electric field,high carrier drift rate,extremely high thermal conductivity,and strong radiation resistance.The research on diamond microwave power devices has attracted widespread attention in recent years.The research progress of diamond microwave power devices is summarized.The research progress,the problems and the development prospects of the microwave power devices based on hydrogen terminated diamond,surface oxide terminated diamond,and doped diamond are mainly analyzed.
作者
蔚翠
冯志红
何泽召
周闯杰
郭建超
马孟宇
余浩
刘庆彬
李鹏雨
YU Cui;FENG Zhi-hong;HE Ze-zhao;ZHOU Chuang-jie;GUO Jian-chao;MA Meng-yu;YU Hao;LIU Qing-bin;LI Peng-yu(National Key Laboratory of Solid State Microwave Devices and Circuits,The 13 th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang 050051,China)
出处
《真空电子技术》
2024年第5期47-53,共7页
Vacuum Electronics
关键词
金刚石
晶体管
电性能
功率
表面终端
Diamond
Field effect transistor
Electrical property
Power
Surface terminal
作者简介
蔚翠(1983-),博士,研究员。主要从事金刚石半导体材料和射频器件、量子探测器件,石墨烯材料和射频器件等研究。
