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基于CMOS的高响应度太赫兹探测器线阵 被引量:1

High responsivity Terahertz detector linear array based on CMOS
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摘要 本文提出了一种基于CMOS 0.18μm工艺的改进型高响应度太赫兹探测器线阵,各探测像素单元由高增益片上天线、高耦合度差分自混频功率探测电路和集成电压放大器组成。其中,差分探测电路利用源极差分驱动场效应管的交叉耦合电容,将太赫兹差分信号耦合至场效应管的栅极与源极,增强场效应管沟道内自混频太赫兹信号的强度,实现高响应度。其次,该探测器配备高增益片上环形差分天线与集成电压放大器,可有效放大混频后的信号,进而提高系统信噪比,最终达到增强探测器响应度的目的。探测器1×3线阵系统充分利用CMOS工艺多层结构的特点,将电压放大器布置在天线地平面下方,提高了芯片面积的利用率,有效降低了制作成本,整个系统的面积为0.5 mm^(2)。测试结果表明,当场效应管的栅极偏置为0.42 V时,该探测系统对0.3 THz辐射信号的电压响应度(Rv)最大可达到43.8 kV/W,对应的最小噪声等效功率(NEP)为20.5 pW/Hz^(1/2)。动态测试结果显示该探测器可对不同材质的隔挡物进行区分。 This paper presents an improved 0.18μm CMOS detector linear array with high voltage responsiveness.Each pixel consists of high-gain on-chip antenna,high-coupling self-mixing power detection circuit and integrated voltage amplifier.The differential detection circuit uses the cross-coupling capacitance of the source differential driven FET,coupling the terahertz differential signal to the gate and the source of the FET,and enhancing the strength of the self-mixing terahertz signal in the channel to achieve high responsiveness.Additionally,the detector is equipped with a high-gain differential annular antenna and an integrated voltage amplifier,which can effectively amplify the mixing signals,thus improving the signal-to-noise ratio of the system,and ultimately enhancing the detector‘s responsiveness.The 1×3 detector linear array system composed of three pixels makes full use of the characteristics of the multi-layer structure of CMOS.The voltage amplifier is arranged below the antenna ground plane,which improves the utilization of the chip area and effectively reduces the production cost.The area of the detector system is 0.5 mm^(2).When the gate is biased at 0.42 V,the measurement results show that,the maximum voltage responsiveness(Rv)can reach 43.8 kV/W under the radiation of 0.3 THz signal,and the corresponding minimum noise equivalent power(NEP)is 20.5 pW/Hz^(1/2).The dynamic measurement results show that the detector can distinguish different material blocks.
作者 白雪 张子宇 徐雷钧 赵心可 范小龙 BAI Xue;ZHANG Zi-Yu;XU Lei-Jun;ZHAO Xin-Ke;FAN Xiao-Long(School of Electrical and Information Engineering,Jiangsu University,Zhenjiang 212013,China;China Electronics Technology Group Corporation 55th Research Institute,Nanjing 210016,China)
出处 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2024年第1期70-78,共9页 Journal of Infrared and Millimeter Waves
基金 国家自然科学基金(61874050)。
关键词 互补金属氧化物半导体 太赫兹 探测器 宽带天线 高响应度 CMOS THz detector broadband antenna high responsiveness
作者简介 白雪(1975-)女,辽宁北票人,副教授,博士。主要研究领域为微波、毫米波太赫兹电路与器件设计,射频电磁波能量收集与传输技术。Email:Baixue@ujs.edu.cn;通讯作者:徐雷钧,Email:xlking@ujs.edu.cn。
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