摘要
提出了一种使用空心微柱介电层的柔性电容式压力传感器,通过倒模的方法制备PDMS和BaTiO_(3)复合材料的空心微柱介电层,通过在PET薄膜上丝网印刷导电银浆制作为阵列式电极。实验表明,该传感器在压力范围为0~5 kPa,5~50 kPa和50~200 kPa时的灵敏度分别为0.498,0.026和0.008 kPa^(-1),最小检测压力可达35 Pa,在1000次重复压力实验中表现稳定,且具有快速的响应速度(约134 ms)。该传感器制备方法简单高效,制作成本低且便于大规模制备,同时该传感器在准确性、稳定性、灵活性等方面都有优秀的表现,可被应用于可穿戴电子设备和智能机器人等领域。
A flexible capacitive pressure sensor using a hollow micro column dielectric layer was proposed.The hollow micro column dielectric layer of PDMS and BaTiO_(3)composite material was prepared by reverse molding,and the array electrode was made by screen printing the conductive silver paste on PET film.The experimental results show that the sensitivities of the sensor are 0.498 kPa^(-1),0.026 kPa^(-1),and 0.008 kPa^(-1)in the pressure range of 0-5 kPa,5-50 kPa,and 50-200 kPa,respectively.The minimum detection pressure can reach 35 Pa,and it shows stability in 1000 times repeated pressure experiments and has a fast response speed(about 134 ms).The preparation method of this sensor is simple and efficient,with low production cost and convenience for large-scale preparation.At the same time,the sensor has excellent performance in accuracy,stability,flexibility,and can be applied in fields such as wearable electronic devices and intelligent robots.
作者
郭常波
张鹏
张龙
黄梁松
李玉霞
张坤
GUO Changbo;ZHANG Peng;ZHANG Long;HUANG Liangsong;LI Yuxia;ZHANG Kun(College of Electrical Engineering and Automation,Shandong University of Science and Technology,Qingdao 266590,Shandong Province,China;Equipment Management Center of Yankuang Energy Co.,Ltd.,Jining 273500,Shandong Province,China)
出处
《电子元件与材料》
CAS
北大核心
2024年第1期33-39,共7页
Electronic Components And Materials
基金
国家自然科学基金重大研究计划(91848206)。
关键词
空心微柱结构
微结构
柔性压力传感器
电容式传感器
阵列
hollow microcolumn structure
microstructure
flexible pressure sensor
capacitive sensor
array
作者简介
通信作者:黄梁松,副教授,博士,主要从事机器人技术、柔性电子皮肤的研究。E-mail:lshuang@sdust.edu.cn。
