摘要
采用磁控溅射法在p-Si衬底上沉积二氧化锡(SnO_(2))纳米薄膜并在其上负载银(Ag)纳米颗粒作为气体传感器的敏感材料。实验结果表明:负载Ag纳米颗粒提高了SnO_(2)纳米薄膜的灵敏度。Ag溅射时间为80 s,负载量为6%质量分数的SnO_(2)纳米薄膜对乙醇气体的响应值较未负载Ag纳米颗粒时提高了78.7%,这可以归因于Ag纳米颗粒与SnO_(2)纳米薄膜之间形成了异质结。实验测试了工作电压对SnO_(2)纳米薄膜灵敏度的影响,当工作电压均为5.5 V时,传感器对乙醇和丙酮气体的响应最佳,响应值分别为3.49和4.51。
SnO_(2) nanofilms are deposited on p-Si substrates by magnetron sputtering method and Ag nanoparticles are loaded on them as sensitive materials for gas sensors.The experimental results show Ag nanoparticles improve the sensitivity of SnO_(2) nanofilms.The response value of SnO_(2) nanofilm with Ag sputtering time of 80 s and mass fraction of 6%loading to ethanol gas is 78.7%increased than that of SnO_(2) nanofilm without Ag nanoparticles loaded.This improvement can be attributed to the formation of heterojunction between Ag nanoparticles and SnO_(2) nanofilm.The effect of working voltage on the sensitivity of SnO_(2) nanofilm is experimentally tested.When the operating voltage is 5.5 V,the senor has the optimal response to ethanol and acetone,and the response values are 3.49 and 4.51,respectively.
作者
刘文强
吴鹏举
王瑗瑗
连艳利
杨莹丽
LIU Wenqiang;WU Pengju;WANG Yuanyuan;LIAN Yanli;YANG Yingli(School of Physics and Electronic Information Engineering,Henan Polytechnic University,Jiaozuo 454003,China;China United Network Communication Co Ltd Jiaozuo Branch,Jiaozuo 454000,China;Instrumental Analysis Center,Henan Polytechnic University,Jiaozuo 454003,China)
出处
《传感器与微系统》
CSCD
北大核心
2024年第2期45-48,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(62173128)
河南省高校科技创新团队支持计划资助项目(21IRTSTHN016)
河南省高校基本科研业务费资助项目(NSFRF210324)。
作者简介
刘文强(1997-),男,硕士,研究方向为气体传感器的设计与制备;吴鹏举(1996-),男,硕士,研究方向为气体传感器的设计与制备;王瑗瑗(1994-),女,硕士,讲师,研究领域为气体传感器的设计与制备;通讯作者:杨莹丽(1980-),女,硕士,讲师,研究领域为气体传感器。
