摘要
为实现对压电式三维力传感器的高精度标定,在原标定模型上引入标定角度偏差因素。针对传感器转角、固定面不平与标定力源偏斜因素,开展了标定模型改进、参数获取与解耦效果分析等研究。分析传感器标定中存在的角度偏差,采用千分表与倾角仪进行测量。对未知参数过多问题,建立了合适的目标函数与约束条件,基于优化算法求解参数,实现了分离标定角度偏差的传感器标定。采用两种模型对实验数据解耦,从解耦误差均值和极值角度证明了新模型的有效性。结果表明:相比旧模型,实验数据下新模型大部分方向的解耦误差均值下降了80%左右,极值下降20%~49%。基于此分析了标定角度偏差对于传感器耦合特性的影响,得到各环节偏差引入的耦合比例,部分耦合系数中标定偏差因素占比达到70%以上。研究表明角度偏差对传感器标定的影响不可忽略,应加以控制。
As the final step in the fabrication of a force sensor,the sensor is calibrated to obtain its true per⁃formance parameters.Therefore,the accuracy of a force sensor is determined by its calibration accuracy.Generally,calibration is an ideal process,but angle deviations can reduce the calibration accuracy.To achieve high-precision calibration of piezoelectric three-dimensional force sensors,a calibration angle-devia⁃tion factor is introduced into the original calibration model.For factors such as uneven surface,sensor an⁃gle,and deflection of force source,calibration model improvement,parameter acquisition,and decoupling effect analyses are performed.First,the angle-deviation factors in sensor calibration are analyzed.A dial indicator and an inclinometer are used for measurement.Second,considering the unknown parameters,an appropriate objective function and constraint conditions are established.Based on the optimization algo⁃rithm,model parameters are solved and sensor calibration to remove calibration angle deviation is real⁃ized.Finally,two models are used to decouple the experimental data.The effectiveness of the new model is proven from the perspective of the mean and extreme values of the decoupling error.Results show that compared to the old model,the mean value of decoupling error in most directions decreases by approxi⁃mately 80%,and the extreme value decreases by 20%-49%,thereby verifying the effectiveness of the pro⁃posed method.On this basis,the influence of angle deviation on sensor coupling characteristics is ana⁃lyzed,and the coupling ratio introduced by each link deviation is obtained.As the calibration angle-devia⁃tion factor accounts for over 70%of partial coupling coefficients,the influence of angle deviation cannot be ignored and should be controlled.
作者
张军
王郁赫
任宗金
孙文举
蔡佳乐
ZHANG Jun;WANG Yuhe;REN Zongjin;SUN Wenju;CAI Jiale(College of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2023年第17期2546-2554,共9页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.52075097,No.5217052316)
国家科技重大专项项目(No.J2019-V-0011-0106)。
关键词
压电式力传感器
标定装置
维间耦合
测量精度
piezoelectric force sensor
calibration device
crosstalk
measurement accuracy
作者简介
张军(1969-),男,吉林长春人,博士,教授,博士生导师,1994年、2009年于大连理工大学分别获得硕士和博士学位,现为大连理工大学机械工程学院传感与振动工程研究所副所长,主要从事压电传感器与测力仪研制、火箭发动机矢量力测量。E-mail:zhangj@dlut.edu.cn;王郁赫(1999-),男,黑龙江佳木斯人,硕士研究生,2021年于大连理工大学获得学士学位,主要从事压电传感器测试精度的研究。E-mail:dutyuhe⁃wang@foxmail.com。
