摘要
六轴力传感器在智能制造、精密装配、运动医疗等领域有着重要应用价值。本研究以大量程六轴力传感器为研究目标,针对六轴力解耦测量和交叉干扰抑制的技术难题,提出了一种压阻式大扭矩动态六轴力传感器的设计方法。在传感器结构设计中,采用4个直梁式三轴力传感器组合的方式进行载荷分摊,满足大力值和大扭矩的测量需求;在三轴力传感器设计中,利用弹性体应力对称性分布的特点和惠斯通电桥平衡原理,布置传感器敏感电阻并组合成测量电桥,实现三轴力的解耦测量;根据六轴力传感器在三轴力和三轴力矩作用下的应力变化规律,采用矩阵解耦的方式实现六轴力解耦测量。
Six-axis force sensor has important application value in intelligent manufacturing,precision assembly,sports medicine and other fields.Aiming at the technical problems of decoupling measurement and cross interference suppression of six-axis force sensor,this study puts forward a design method of piezoresistive high-torque dynamic six-axis force sensor.In sensor structure design,four straight beam three-dimensional force sensors are combined to share the load,so as to meet the requirements of high load.In three-dimensional force sensor design,the symmetry of elastomer stress distribution and the principle of Wheatstone bridge balance were used,and the sensitive resistors were organized into measuring circuit for three-dimensional force decoupling measurement.According to the stress variation law of the combined sensor under six-axis forces and torques,the six-axis forces and torques are measured by matrix decoupling.
作者
赵友
赵玉龙
ZHAO You;ZHAO Yulong(Xi'an Jiaotong University,State Key Laboratory for Manufacturing Systems Engineering,Xi'an 710049,China)
出处
《遥测遥控》
2023年第3期78-85,共8页
Journal of Telemetry,Tracking and Command
关键词
六轴力传感器
解耦测量
交叉干扰
矩阵解耦
Six-axis force sensor
Decoupling measurement
Cross interference
Matrix decoupling
作者简介
赵友,1990年生,博士,副研究员,硕士生导师,主要研究方向为MEMS高温压力/振动传感器、切削力传感器与智能刀具。;赵玉龙,1968年生,教授,博士生导师,主要研究方向为MEMS技术、传感器技术及微纳制造领域基础理论和工程应用。
