摘要
针对目前IC制造装备物料状态检测方法的缺点,提出了基于真空吸附性能的物料状态检测方法,其特点在于实现了物料固定与状态检测的有机统一。首先确定以掩模版为研究对象,综合分析后选择其底面作为真空吸附面与检测平面;其次运用有限元分析和现场实验对真空吸附性能进行研究,其真空响应时间和判别阈值均满足设计需求;最后通过对比实验完成了检测方法的可行性分析。结果表明利用真空吸附方式既能准确判别物料状态,又能保证物料传输的安全性和可靠性。基于真空吸附性能的物料状态检测方法具有通用性,为后续产品优化设计提供了实验数据和理论支撑。
Aiming at the disadvantages of current material state detection methods for IC manufacturing equipment,a material state detection method based on vacuum adsorption performance is proposed,which is characterized by realizing the organic unity of material fixation and state detection. First,mask selected as a research object,and its bottom is selected as a vacuum adsorption surface and detection plane after comprehensive analysis;Secondly,the vacuum adsorption performance is studied by Finite Element Analysis(FEA) and field experiment, and the vacuum response time and discrimination threshold meet the design requirements;Finally,feasibility analysis of the detection method is completed through comparative experiments. The results show that the vacuum adsorption method can not only accurately identify the material states,but also ensure the safety and reliability of material transmission. The performance of the material state detection method based on the vacuum adsorption performance is universal,which provides experimental data and theoretical support for the subsequence product optimization design.
作者
赵东雷
王浩楠
赵晨阳
常美榕
张子鹏
ZHAO Donglei;WANG Haonan;ZHAO Chenyang;CHANG Meirong;ZHANG Zipeng(The 45^(th) Research Institute of CETC,Beijing 100176,China)
出处
《电子工业专用设备》
2023年第1期50-54,59,共6页
Equipment for Electronic Products Manufacturing
关键词
状态检测
真空吸附
响应时间
阈值
State detection
Vacuum adsorption
Response time
Threshold
作者简介
赵东雷(1989-),男,河北邯郸人,硕士,工程师,主要从事半导体专用设备机械设计及工业机器人研究工作。
