摘要
对巨量转移(Mass Transfer, MT)方案和运动定位平台(Motion Positioning Platform, MPP)的研究现状及其未来发展进行了详细阐述。根据芯片转移方式,将MT方案分为精准拾取-释放技术、自组装技术、滚轴转印技术、激光剥离技术,结合芯片转移效率和良率,论述了国内外MT方案的发展过程。在此基础上,从平台支撑方式,详细介绍了机械构型、气浮构型、磁浮构型和混合构型的MPP结构及工作原理,考虑运动行程、运动定位精度等因素,比较了MPP性能的优劣。展望了MT方案和MPP技术的未来发展方向,指出基于微孔液气双态介质的激光剥离MT和具备周向小角度修正以及轴向微高度调节能力的“机械+磁浮”混合构型MPP是Mini/Micro LED芯片转移技术的研究重点。
This paper expounds the current research and future development of Mass Transfer(MT) and Motion Positioning Platform(MPP) technology. On the basis of the chip transfer method, the MT scheme can be divided into precision pick-and-release, self-assembly, roller-transfer, and laser lift-off technology. The development process of the MT scheme is discussed based on the chip transfer efficiency and yield. On this basis, the structures and working principles of mechanical, air-supported, magnetic levitation, and hybrid configurations are introduced. Considering the aspects such as motion stroke and positioning accuracy, the advantages and disadvantages of MPPs are discussed. Finally, the development prospects of MT and MPP devices are predicted. Laser lift-off technology based on microporous liquid-gas bimodal media and hybrid-configuration MPP that combines mechanical and magnetic tracks with circumferential small-angle correction and axial micro-height-adjustment capabilities are expected to form the focus of the research on Mini/Micro LED chip-transfer technology.
作者
王伟
赵甜甜
刘强
韩邦成
牛萍娟
桑建
WANG Wei;ZHAO Tiantian;LIU Qiang;HAN Bangcheng;NIU Pingjuan;SANG Jian(Institute of Precision Electromagnetic Equipment and Advanced Measurement Technology,Beijing Institute of Petrochemical Technology,Beijing 102617,China;School of Electronic and Information Engineering,Tiangong University,Tianjin 300387,China;Key Laboratory of Inertial Technology,Beihang University,Beijing 100191,China;Guangzhou Hongli Opto-Electronic Co.,Ltd.,Guangzhou 510890,China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2023年第2期183-199,共17页
Optics and Precision Engineering
基金
北京市自然科学基金面上项目资助(No.3212004)
北京石油化工学院重要科研成果培育资助项目(No.BIPTACF-007)。
作者简介
王伟(1965-),女,吉林省白城市人,副教授,硕士生导师,1992年毕业于中国科学院长春光学精密机械研究所,获得硕士学位,主要从事测量与控制技术和磁悬浮支撑技术的研究。E-mail:shaowang66@163.com;通讯作者:刘强(1983-),男,江西九江人,教授,博士生导师,2013年于北京航空航天大学获得博士学位,主要从事Mini/Micro LED巨量转移和磁悬浮轴承技术研究。E-mail:liuqiangbuaa@163.com。
