摘要
为满足国内厂商对集成电路测试中测试探针出厂检测的要求,分析了测试探针需要检测的功能、参数和测试方法,利用压力传感器、温度传感器、激光位移传感器、电阻测量计、运动模块执行机构以及控制与数据采集模块,设计了一种以LabVIEW为核心的多功能测试探针性能检测系统,实现了对测试探针性能的自动测试。实验结果表明,所设计系统能够对测试探针进行有效的性能检测,测量误差小于±4%,测试时间比传统人工测量提高了5倍左右,检测系统性能稳定,显著提升了测试效率和测试精度。
In order to meet the requirements of domestic manufacturers for the ex-factory testing of test probes in integrated circuit testing, this paper analyzes the functions, parameters and test methods of the test probe. Using pressure sensor, temperature sensor, laser displacement sensor, resistance meter, motion module actuator and control and data acquisition module, a multifunctional test probe performance detection system based on LabVIEW is designed, which realizes the automatic test of the test probe. The experimental results show that the designed system can effectively detect the performance of the test probe. The measurement error is less than ±4 %, and the test time is about 5 times higher than that of the traditional manual measurement. The system performance is stable, and the test efficiency and accuracy are significantly improved.
作者
汪俞成
肖金球
李盈
焦文开
谢翔
Wang Yucheng;Xiao Jinqiu;Li Ying;Jiao Wenkai;Xie Xiang(College of Physical Science and Technology,Suzhou University of Science and Technology,Suzhou 215009,China;Intelligent Measurement and Control Engineering Technology Research Center,Suzhou 215009,China)
出处
《国外电子测量技术》
北大核心
2022年第10期97-103,共7页
Foreign Electronic Measurement Technology
基金
江苏省产学研前瞻性重点项目(BY2011132)
江苏省住房和城乡建设厅科技项目(341731604)
江苏省研究生创新工程基金(KYCX21_3010)项目资助。
作者简介
汪俞成,硕士研究生,主要研究方向为光电仪器与智能检测技术。E-mail:1579021474@qq.com;通信作者:肖金球,教授,硕士生导师,高级工程师,主要研究方向为智能仪器与光电自动检测技术。E-mail:xjq_usts@126.com。
