摘要
本文提出并制备了一个基于游标效应的高灵敏度光纤气压传感器。该传感器包含两个并联的法布里-珀罗干涉仪(FPI),它们均由单模光纤和一小截毛细管熔接构成,分别作为传感腔和参考腔,且其中传感腔的侧面刻蚀微通道,以便于待测气体进入。俩干涉仪间较小的光程差导致传感器产生具有游标效应的叠加反射光谱,气压灵敏度得到极大的提高,达到~64 pm/kPa,该值是单一FPI的~16倍。另外,实验结果显示,该传感器对温度不敏感,从而减少了环境温度对气压测量结果的影响。结构结实、气压灵敏度高等优点,预示着该传感器在工业生产、气体检测等领域具有广阔的应用前景。
A highly sensitive optical fiber sensor based on the Vernier effect is demonstrated for gas pressure sensing.It consists of two paralleled Fabry-Perot interferometers(FPIs),which are both produced by splicing a single-mode fiber to a short segment of capillary tube,acting as sensing cavity and reference cavity,respectively.The lateral wall of the sensing FPI is drilled with a micro-channel allowing gas to flow in.Due to the small optical path difference between the two FPI,the Vernier effect is caused in the reflected spectrum of the sensor.Thus,the gas-pressure sensitivity is significantly enhanced,achieving up to~64 pm/kPa which is~16 times higher than that of a single FPI.Additionally,experimental results show that the sensor is insensitive to the surrounding temperature,which reduces the influence of ambient temperature on the measurement of gas pressure.The advantages of robust structure and high sensitivity of gas pressure indicate that the demonstrated sensor has a promising potential in industrial production,gas detection,and other fields.
作者
郭允
吴玉纯
王嘉浩
张莹方
王东宁
徐贲
Guo Yun;Wu Yuchun;Wang Jiahao;Zhang Yingfang;Wang Dongning;Xu Ben(College of Optical and Electronic Technology,China Jiliang University,Hangzhou,Zhejiang 310018,China;Faulty of Information Technology,Macao University of Science and Technology,Macao 999078,China)
出处
《光电工程》
CAS
CSCD
北大核心
2022年第8期46-54,共9页
Opto-Electronic Engineering
基金
浙江省自然科学基金资助项目(LY19F050010)
微光机电系统技术教育部重点实验室(天津大学)开放基金资助项目(MOMST 2016-1)。
关键词
光纤传感
法布里-珀罗干涉仪
游标效应
气压
optical fiber sensor
Fabry–Perot interferometer
vernier effect
gas pressure
作者简介
通信作者:徐贲(1979-),男,博士,副教授,2015年毕业于澳门科技大学,现在中国计量大学光电学院从事教学科研,领域涉及飞秒激光微加工和光纤传感等。主持和参与国家、省部级科研项目10多项,发表高质量论文20余篇,获各类授权专利共50余项。xuben@cjlu.edu.cn;郭允(1996-),男,硕士研究生,目前就读于中国计量大学,主要研究方向是光纤传感领域。E-mail:s1904080304@cjlu.edu.cn。
