摘要
在大学物理实验迈克逊干涉实验光路观测干涉条纹的基础上,引入一种测量物体表面形貌的实验。实验要求学生通过改变参考镜的倾角引入光程差,以获得合适周期分布的干涉条纹,使用CCD或工业相机采集单帧干涉条纹图样,通过Matlab编写以傅里叶变换与频域滤波为主的算法处理干涉条纹,得到被测物体的表面形貌。
Based on the college physical experiment of interference pattern observation by Michelson interferometer,an experiment to measure the surface profile is proposed.It asks the student to obtain the interference pattern with proper period by adding the additional optical path difference from adjustment of reference mirror inclination.The CCD or industrial camera is used to capture single frame of the interference pattern.Matlab is used to make the program mainly containing the Fourier transform and filtering algorithm to process the interference pattern to calculate the surface profile.
作者
罗松杰
王孝艳
LUO Songjie;WANG Xiaoyan(School of Information Science and Engineering,Huaqiao University,Xiamen 361021,China)
出处
《大学物理实验》
2022年第1期79-82,共4页
Physical Experiment of College
基金
国家自然科学基金项目(62005086)
华侨大学科研基金资助项目(605-5J115013)
东莞市引进创新创业领军人才计划(201927879)。
关键词
迈克尔逊干涉仪
傅里叶变换
形貌测量
Michelson interferometer
Fourier transform
surface profile measurement
