摘要
采用飞秒激光对SiC陶瓷进行螺旋微孔加工实验,研究了能量密度对材料微孔加工形貌及孔形的影响,分析了微孔孔径、圆度及锥度随激光加工工艺参数的变化规律。实验结果表明,相比于微孔出口而言,微孔入口受能量密度的影响较小,更高的能量密度有利于提高微孔的加工质量。该研究获得了孔径小于250μm、圆度大于0.95、锥度小于1°的近圆柱SiC陶瓷微孔。对加工区域进行检测,发现材料表面存在一定程度的氧化现象,分析了位于不同加工区域元素含量变化的原因。
Helical drilling experiments of SiC ceramic were carried out by femtosecond laser. The effects of energy density on the processing morphology and shape of micro-hole in material were studied. The laws of variation of diameter, circularity and taper of micro-hole with laser machining parameters were analyzed. The experimental results show that micro-hole at entrance is less affected by energy density in comparison with that at exit. Higher energy density is conducive to improve the processing quality of micro-hole. Near cylindrical micro-hole of SiC ceramic with the diameter less than 250 μm, the circularity more than 0.95 and the taper less than 1° was obtained. It was found that a certain degree of oxidation existed on the surface of material by detecting the machining zone. The reasons for elemental contents change in different processing areas were analyzed.
作者
王宏建
杨涛
吴小雪
廖润钱
邓辅秦
WANG Hongjian;YANG Tao;WU Xiaoxue;LIAO Runqian;DENG Fuqin(Songshan Lake Materials Laboratory,Dongguan 523808,CHN;School of Physics and Materials Science,Guangzhou University,Guangzhou 510006,CHN;School of Intelligent Manufacturing,Wuyi University,Jiangmen 529030,CHN;Shenzhen Institute of Artificial Intelligence and Robotics for Society,Shenzhen 518129,CHN)
出处
《半导体光电》
CAS
北大核心
2021年第6期864-867,874,共5页
Semiconductor Optoelectronics
基金
广东省基础与应用基础研究基金项目(2020A1515111183)
广东省教育厅重点领域专项项目(2019KZDZX1025)
深圳市人工智能与机器人研究院重点探索型科研项目(AC01202101026)。
关键词
飞秒激光
能量密度
SIC
螺旋制孔
femtosecond laser
energy density
SiC
helical drilling
作者简介
通信作者:王宏建(1989-),男,博士,工程师,主要研究方向为半导体材料的激光加工技术与装备。
