摘要
针对压电单晶片微夹钳和压电双晶片微夹钳的缺点,设计了一种新型多层压电悬臂梁微夹钳,具有结构简单、输出位移行程大、振荡较小、不易破坏操作对象等优点。确定了压电材料与中间黄铜基板的具体型号、具体尺寸,使多层压电微夹钳的性能达到最优。利用ANSYS仿真软件对所设计多层微夹钳的静动态进行分析,仿真结果如下:施加120 V的驱动电压,单钳指尖顶端最大可产生177.8μm的位移量,双钳指则可实现355.6μm的夹持行程;施加频率为10000 Hz,幅值为3.25 V的驱动电压,得出其前10阶固有频率,其一阶固有频率即可满足实际工程中大部分操作的应用;施加幅值为60 V(每片压电晶片为60 V)、频率为0~2000 Hz的扫频信号,其一阶固有频率与前面模态分析的结果基本相同;施加幅度为15 V(每层压电晶片为15 V)、持续时间为0.2 s的阶跃电压,其位移响应较平坦,无振荡。
Aiming at the shortcomings of piezoelectric single micro-gripper and piezoelectric bimorph micro-gripper,a new multi-layer piezoelectric micro-gripper was designed,which had the advantages of simple structure,large output displacement,small oscillation and not easy to destroy the operation object.ANSYS simulation software was used to analyze the static and dynamic characteristics of the designed multi-layer micro-gripper.The simulation results are as follows:when 120 V driving voltage is applied,177.8μm can be generated at the top of the clamp finger tip displacement,apply a driving voltage of 10000 Hz to obtain the first 10 natural frequencies,apply a sweep signal with amplitude of 60 V(60 V for each piezoelectric wafer)and frequency of 0~2000 Hz,and its first-order natural frequency is basically the same as that of the previous modal analysis.When a step voltage with an amplitude of 15 V(15 V for each layer of piezoelectric wafer)and a duration of 0.2 s is applied,the displacement response is flat without oscillation.
作者
蔡永根
肖国华
杨少增
Cai Yonggen;Xiao Guohua;Yang Shaozeng(Zhejiang Business Technology Institute,Ningbo,Zhejiang 315012,China)
出处
《机电工程技术》
2022年第1期34-37,共4页
Mechanical & Electrical Engineering Technology
基金
浙江省教育厅一般科研项目(编号:Y202044881)。
关键词
压电微夹钳
输出位移
静动态分析
ANSYS仿真
piezoelectric micro clamp
output displacement
static and dynamic analysis
ANSYS simulation
作者简介
第一作者:蔡永根(1990-),男,河南商丘人,硕士,助教,研究领域为微/纳米定位;通讯作者:肖国华(1978-),男,湖南益阳人,讲师,研究领域为微/纳米定位及精密测量。
