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电弧离子镀工艺参数对Cr涂层沉积及性能的影响 被引量:4

Effect of Arc Ion Plating Technological Parameters on the Deposition and Properties of Cr Coatings
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摘要 为研究工艺参数对Cr涂层沉积及性能的影响,采用多弧离子镀技术在Zr-4合金表面制备Cr涂层,利用正交试验设计合理的弧电流、偏压、气压试验条件表,重点分析了工艺参数对Cr涂层质量、沉积速率及性能的影响。利用室温拉伸试验测试涂层的膜基协同变形能力,利用1000℃、60 min空气中氧化试验测试Cr涂层的耐高温氧化性能。结果表明:Cr涂层主要以沿锆基体法向择优生长的柱状晶为主,气压对Cr涂层的沉积速率影响最大,弧电流对室温拉伸后涂层表面线状撕裂密度的影响最明显,偏压对Cr涂层的表面粗糙度和耐高温氧化性能影响最大。因此,设计合理的工艺参数,可获得综合性能优异的Cr涂层。 Aiming at studying the effect of technological parameters on the deposition rate and properties of Cr coatings,the Cr coatings were deposited on the surface of Zr-4 alloy by arc ion plating(AIP).With using orthogonal experiment to design reasonable arc current,bias voltage and air pressure test condition table,the effect of technological parameters on the quality,deposition rate and performance of Cr coating.Moreover,the coordinating deformation between substrate and coating was evaluated by room temperature tensile test,and the high temperature oxidation resistance of Cr coatings was measured by oxidation test at 1000℃for 60 min in air.Results showed that the columnar crystals grew along the normal direction of zirconium substrate,and air pressure had most significant effect on deposition rate of Cr coatings.In addition,arc current possessed an obviously effect on linear tear density of coatings surface after tensile test at room temperature,and bias voltage had most significant effect on the surface roughness and high temperature oxidation resistance of Cr coatings.Therefore,designing reasonable technological parameters was able to prepare the Cr coatings with excellent performance.
作者 杨红艳 韦天国 张瑞谦 王昱 陈寰 YANG Hong-yan;WEI Tian-guo;ZHANG Rui-qian;WANG Yu;CHEN Huan(Science and Technology on Reactor Fuel and Materials Laboratory,Nuclear Power Institute of China,Chengdu 610213,China)
出处 《材料保护》 CAS CSCD 2021年第12期97-103,共7页 Materials Protection
基金 装备预研重点实验室基金(6142A06200310)资助。
关键词 多弧离子镀 Cr涂层 工艺参数 沉积速率 协同变形 高温氧化 arc ion plating Cr coating technological parameters deposition rate coordinating deformation high temperature oxidation
作者简介 通信作者:杨红艳(1983-),硕士,副研究员,现主要从事核材料制备与性能表征技术研究,电话:13618050129,E-mail:yhy072731@163.com。
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