摘要
目前,微加工和精加工技术的迅速发展对微型化加工技术提出了更高的要求:将加工尺度提高到微米甚至纳米级,并且能够在材料内部实现三维立体微加工。飞秒激光可以突破衍射极限的限制,打破了加工极限,是当前先进制造技术的热点。本文综述了飞秒激光加工的发展历程和机理,并从库仑爆炸模型、微爆炸模型、色心模型以及双光子电离模型等方面对激光加工机理进行了阐述。对于飞秒激光的超快作用过程,仿真是分析加工机理、研究激光与材料作用过程的主要手段。分析了飞秒激光仿真所采用的双温模型、分子动力学模型及复合模型的特点及其适用范围,为飞秒激光加工的理论研究提供依据。最后指出了目前飞秒激光加工技术存在的问题,并对该技术的发展进行了展望。
At present,the rapid development of micro-machining and finishing technology has put forward higher requirements for miniaturization processing technology:the processing scale needs to be improved to the micron or even nanometer scale,and three-dimensional micro-machining can be achieved inside the material.Femtosecond laser can break through the limit of diffraction limit and machining limit,and is the hot spot of advanced manufacturing technology.In this paper,the development and mechanism of femtosecond laser machining are reviewed,and the mechanism of laser machining is described from the Coulomb explosion model,microexplosion model,color center model and two-photon ionization model.For femtosecond laser ultrafast action process,simulation is the main means to analyze the machining mechanism and study the laser and material action process.The characteristics and application range of the two-temperature model,molecular dynamics model and composite model used in femtosecond laser simulation are analyzed in order to provide a basis for the theoretical research of femtosecond laser machining.Finally,the existing problems of femtosecond laser machining technology are pointed out,and the development of this technology is prospected.
作者
吴雪峰
梅三林
Wu Xuefeng;Mei Sanlin(School of Mechanical Power Engineering,Harbin University of Science and Technology,Harbin,Heilongjiang 150080,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2021年第19期50-66,共17页
Laser & Optoelectronics Progress
基金
国家重点研发计划(2018YFB1107600)
“理工英才”计划基础研究项目(LGYC2018JC042)。
关键词
激光技术
飞秒激光
加工机理
双温模型
分子动力学模型
laser technique
femtosecond laser
machining mechanism
two-temperature model
molecular dynamics model
作者简介
通信作者:吴雪峰,wuxuefeng@hrbust.edu.cn。
