摘要
以高纯α相氮化硅为原料,Y_(2)O_(3)为烧结助剂,采用放电等离子烧结制备氮化硅陶瓷。研究烧结温度对陶瓷导热性能和力学性能的影响,以及经过后续常压热处理的性能变化。结果表明,放电等离子烧结(1600~1700℃)可制备致密度大于99%的氮化硅陶瓷,其中,在1700℃烧结制备的氮化硅陶瓷具有较好的综合性能。经过1750℃常压热处理后,晶粒尺寸进一步增大,液相由非晶态转化为结晶态,所有样品的第二相组成均为Y_(5)Si_(3)O_(12)N。陶瓷抗弯强度由551提高至775 MPa,热导率由43.6提高至61.1 W/(m·K)。
Silicon nitride ceramics were prepared by spark plasma sintering(SPS)with high-purityα-Si_(3)N_(4) powder as raw material and Y_(2)O_(3)as sintering aid.The effect of sintering temperature on thermal conductivity and mechanical properties of ceramics was investigated,and the performance change after atmospheric pressure heat treatment was studied.The results show that Si_(3)N_(4) ceramics with relative density>99%can be obtained by SPS process(1600~1700℃),and the ceramic sintered at 1700℃has optimal comprehensive properties.After heat treatment at 1750℃,the grain size further increases,the liquid phase changes from amorphous to crystalline,and the second phase of all samples is Y_(5)Si_(3)O_(12)N.The bending strength of the ceramic increases from 551 to 775 MPa,and the thermal conductivity increases from 43.6 to 61.1 W/(m·K).
作者
王月隆
吴昊阳
贾宝瑞
张一铭
张智睿
刘昶
田建军
秦明礼
WANG Yue-long;WU Hao-yang;JIA Bao-rui;ZHANG Yi-ming;ZHANG Zhi-rui;LIU Chang;TIAN Jian-jun;QIN Ming-li(Institute for Advanced Materials and Technology,University of Science and Technology Beijing,Beijing 100083,China)
出处
《真空电子技术》
2021年第5期58-63,共6页
Vacuum Electronics
基金
国家自然科学基金项目(51774035,51604025,51574031,51574030,51574029,51604240)
河北省重点研究发展项目(20311001D)
北京市自然科学基金项目(2202031,2174079,2162027)
中央高校基础研究基金(FRF-IDRY-19-025,FRF-TP-20-032A2,FRF-TP-19-002B1,FRF-TP-19-015A3,FRF-TP-19-003C2,FRF-TP-17-034A2)
USTB-NTUT联合研究项目(06310061)
湖南省教育厅科研经费资助项目(18A196)
北京科技大学顺德研究生院博士后研究基金项目(2020BH014)。
关键词
氮化硅
放电等离子烧结
常压热处理
热导率
Silicon nitride
Spark plasma sintering
Heat treatment
Thermal conductivity
作者简介
王月隆(1991-),男,2018年获硕士学位,现在为北京科技大学材料学部博士生,主要进行氮化物粉体制备以及高导热陶瓷的研究,E-mail:13838184832@163.com。
