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SEGREGATION EFFECT ON SURFACE COMPOSITION IN ALLOY SPUTTERING 被引量:2

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摘要 The modified dynamic TCIS(Transport and atomic Collision cascade of energetic Ions an Solids)Monte Carlo program including the radiation-enhanced Gibbsian segregation(REGS)is employed to estimate the compositional distributions at surface of the Au_(0.56)Cu_(0.44) alloy under 2keV Ar^(+) ion bombardment at high dose.The calculation results exhibit that the Au composition enriches in the first layer(74 at.%),depletes in the second layer(37 at.%)and gradually rises with depth to the bulk composition.The effect of the relation between sputter depth and segregation layer on the surface concentration of Au_(0.56)Cu_(0.44) is also discussed.
出处 《Chinese Physics Letters》 SCIE CAS CSCD 1990年第3期140-143,共4页 中国物理快报(英文版)
关键词 ALLOY LAYER SURFACE
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