摘要
We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm.To obtain a planar waveguide, oxygen ions with an energy of 3.0 Me V and a fluence of 1.5 × 10^(15) ions=cm^(2) are implanted in the polished face of Li Nb O_(3) crystals. For planar waveguides, a loss of 0.5 d B/cm is obtained after annealing at 300°C for30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods.
作者
Jinhua Zhao
Xueshuai Jiao
Yingying Ren
Jinjun Gu
Sumei Wang
Mingyang Bu
Lei Wang
赵金花;焦学帅;任莹莹;谷金军;王素梅;卜铭洋;王磊(School of Science,Shandong Jianzhu University,Jinan 250101,China;Shandong Provincial Engineering and Technical Center of Light Manipulations&Shandong Provincial Key Laboratory of Optics and Photonic Device,School of Physics and Electronics,Shandong Normal University,Jinan 250014,China;School of Physics,Shandong University,Jinan 250100,China)
基金
supported by the National Natural Science Foundation of China(Nos.11874243 and 11805142)
the Natural Science Foundation of Shandong Province(No.ZR2017MA052)。
作者简介
Corresponding author:赵金花,zhaojinhua@sdjzu.edu.cn。
