摘要
A novel two-wafer concept for micro-electro-mechanically tunable vertical cavity surface emitting lasers(VCSELs)is presented.The VCSEL is composed by two wafers:one micro-electromechanical-system membrane wafer with four arms to adjust the cavity length through electrostatic actuation and a"half-VCSEL"wafer consisting of a fixed bottom mirror and an amplifying active region.The measurement results of the electricity pumped tunable VCSEL with more than 9mW output power at room temperature over the tuning range prove the feasibility of the proposition.
基金
Supported by the National Basic Research Program of China under Grant No 2006CB604902
the National Natural Science Foundation of China under Grant No 60908012
the Program for New Century Excellent Talents in University of Ministry of Education of China under Grant No 39002013200801
the National Natural Science Foundation of China under Grant No 61076048
the Board of Education Research Project under Grant No KM2010005030.
作者简介
郭霞.Email:guo@bjut.edu.cn。
