摘要
在密闭腔室,设计加热器和测温元件结构并充入气体后加热,腔室内可以形成稳定的热对流场。由于气体存在惯性,当外界有加速度作用时,指定位置放置的pn结可以检测到温度变化。通过仿真分析优化了腔室的合适直径和pn结放置的具体位置。为有效提高温差,优化了pn结的形状以解决因提高气体工作温度带来的热应力集中问题。利用微细加工技术制备了加热器、pn结及腔室结构。对所制备的pn结的伏安特性进行了测试,封装后的传感器测试结果表明:气体温度为200℃时,传感器的灵敏度为8 mV/g,非线性度为0.23%。制备的基于pn结的微热加速传感器具有应力小、灵敏度高的特点。
In a closed chamber, the heater and temperature measuring element structure were designed and heated after being filled with gas. A stable thermal convection field can be formed in the chamber. Due to the existence of the gas inertia, when there is acceleration from the outside, the pn junction placed at the designated position can detect temperature changes. Through the simulation and analysis, the appropriate diameter of the chamber and the specific location of the pn junction were optimized. In order to effectively increase the temperature difference, the shape of the pn junction was optimized to solve the problem of the thermal stress concentration caused by the increase of the gas working temperature. The heater, pn junction and chamber structure were fabricated using the microfabrication technology. The volt-ampere characteristics of the prepared pn junction were tested. The test results of the packaged sensor show that when the temperature of the gas is 200 ℃, the sensor sensitivity is 8 mV/g and the nonlinearity is 0.23%. The prepared micro thermal acceleration sensor based on the pn junction has the characteristics of low stress and high sensitivity.
作者
王佩英
邱霁玄
张成功
王欢
李以贵
Wang Peiying;Qiu Jixuan;Zhang Chenggong;Wang Huan;Li Yigui(School of Science,Shanghai Institute of Technology,Shanghai 201418,China)
出处
《微纳电子技术》
CAS
北大核心
2021年第5期410-415,共6页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(51035005)
上海市科技兴农重点攻关项目(沪农科创字(2018)第3-3号)。
作者简介
王佩英(1996-),女,江西抚州人,硕士研究生,主要研究方向为微传感器;通信作者:李以贵(1965-),男,江西广昌人,教授,博士生导师,主要从事微光机电系统方面的研究。E-mail:ygli@sit.edu.cn。
