摘要
针对等离子体隐身中机载小型化射频电源在阻抗匹配网络的匹配速度慢和匹配精度低的问题,提出了一种新的阻抗匹配优化算法。通过分析射频电路阻抗匹配过程提出优化目标函数,根据电路输出有功功率与匹配电容的特性曲线自寻优系统峰值,利用切换环节结合终端滑模控制设计了改进终端滑模极值搜索算法,得到L型匹配网络电容的优化值,获得射频源输出最大功率,并证明了该控制方法的稳定性。该方法在滑模极值寻优二三模式切换时设定阈值函数,并在滑模振荡阶段加入终端滑模面减小系统稳态误差,保证了系统稳态振荡幅值减小的基础上提高收敛速度,并降低系统计算复杂度。通过与传统滑模搜索进行对比,仿真和实验结果证明了该方法有效性。
Aimed at the problems that matching speed is slow and matching accuracy is low in airborne miniaturized RF power supply in plasma stealth.Through analyzing rf circuit impedance matching process,an optimization objective function is put forward.According to the characteristic curve of circuit output active power and matching capacitance,the peak value of objective function is founded.An improved terminal sliding mode extremum search algorithm is designed by combining switching links with terminal sliding mode control,the optimal values of L shape matching network and the maximum power output for rf source are obtained.Moreover,the stability of this control method is proved.Based on the optimization of the sliding mode extremum,the threshold function is set when switching between mode 2 and mode 3 is made,and the terminal sliding mode surface is added at the sliding mode oscillation stage to reduce the steady-state error of the system,reducing the steady-state oscillation amplitude of the system,increasing the convergence speed and simplifying the computational complexity of the system.Compared with the traditional sliding mode method,the simulation results show that the proposed method is valid.
作者
李颖晖
武颂尧
林茂
邱枭楠
李勐
LI Yinghui;WU Songyao;LIN Mao;QIU Xiaonan;LI Meng(Aeronautics Engineering College,Air Force Engineering University,Xi’an 710038,China;Technical Service Centre for Military Vocational Education,National University of Defence Technology,Changsha 410073,China)
出处
《空军工程大学学报（自然科学版）》
CSCD
北大核心
2021年第2期1-7,共7页
Journal of Air Force Engineering University(Natural Science Edition)
基金
国家自然科学基金(12075319)。
关键词
射频电路
感应耦合等离子体
滑模极值搜索
阻抗匹配
终端滑模
radio frequency circuit
inductively coupled plasma
sliding mode extremum search
impedance matching
terminal sliding mode
作者简介
李颖晖(1966-),湖南株洲人,教授,研究方向:航空电气设备与运用、先进控制理论与应用。E-mail:liyinghui66@163.com;通信作者:武颂尧(1996-),山西忻州人,硕士生,研究方向:感应耦合等离子体阻抗匹配控制。E-mail:1055484317@qq.com。
