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金属透射样品的制备和高分辨表征 被引量:4

Preparation of metal thin foils for high resolution TEM characterization
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摘要 采用电解双喷实验设备制备析出强化合金钢、镍基高温合金和中熵合金的透射样品,分析电解双喷参数的选取原则,总结各种合金材料的最佳电解双喷参数及克服钢铁磁性的透射观察方法;采用双喷后两步离子减薄法清除样品的表面氧化物;在氧化物无法清除的情况下,提出识别氧化物的方法。研究结果表明:采用电解双喷的选取原则,减小样品的初始厚度,能够获得低磁性、大薄区的金属透射样品;在不同时效时间、不同制备方法下,发生不规律变化的衍射斑来自于氧化物,根据衍射斑特点能有效排除氧化物斑点的影响。 The thin foils of different alloys such as precipitate-hardened steels,Hastelloy alloys and CoCrNi medium-entropy alloys were prepared.The selection principles were analyzed.The best parameters for twin-jet electropolishing and the rules for TEM observation of steels were summarized to minimize their magnetic influence.Furthermore,a two-step ion milling process was used to remove surface oxides.The method to recognize and differentiate surface oxides for TEM observation was proposed.The results show that adopting the selection principles of twin-jet electropolishing and reducing the initial thickness of the sample can get large area and low-magnetic metal thin foils.At different aging time and using different preparation methods,the irregularly changed diffraction spots are from oxides.The method can be used to eliminate the influence of oxide diffraction spots.
作者 白红日 汪浩 梁鎏凝 刘烨 沈希 温玉仁 BAI Hongri;WANG Hao;LIANG Liuning;LIU Ye;SHEN Xi;WEN Yuren(School of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,China;School of Materials Science and Engineering,Xiangtan University,Xiangtan 411105,China;Institute of Physics,Chinese Academy of Sciences,Beijing 100190,China)
出处 《中南大学学报(自然科学版)》 EI CAS CSCD 北大核心 2020年第11期3169-3177,共9页 Journal of Central South University:Science and Technology
基金 中央高校基本科研业务费资助项目(06500099)。
关键词 透射样品制备 电解双喷减薄 离子减薄 磁性样品 表面氧化物 preparation of TEM sample twin-jet electropolish ion milling magnetic sample surface oxide
作者简介 通信作者:温玉仁,博士,副教授,从事高强高韧钢和透射电子显微学研究,E-mail:wyrcsu@163.com。
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