摘要
物理气相沉积(Physical vapor deposition,简称PVD)硬质金属陶瓷涂层在各行业的应用广泛,并逐渐成为促进国民行业发展的重要支柱之一。硬质涂层性能对于工模具加工特性的影响极为关键。近些年,由于我国巨大的市场需求,致使我国涂层技术发展速度迅猛,在高硬度、多组元、多层膜研究领域已取得巨大进步。但为满足高强度材料的制造及复杂成型加工对高性能硬质涂层的迫切需求,超硬、耐磨、抗高温已成为开发高性能硬质涂层的关键技术指标。详细介绍了掺杂IVB族、VB族和VIB族元素对TiN、TiAlN涂层性能的影响,以及多层化、周期化涂层技术在强化硬质涂层性能方面的研究现状,并针对研究现状提出拟解决的问题。
Physical vapor deposition(PVD)hard cermet coatings are widely used in various industries,and gradually become one of the important pillars to promote the development of national industry.The performance of hard coating is very important to the machining characteristics of tools and dies.In recent years,due to the huge market demand in China,the coating technology has developed rapidly,and has made great progress in the field of high hardness,multi-component and multi-layer film research.However,in order to meet the urgent needs of high-performance hard coatings for the manufacture of high-strength materials and complex forming process,superhard,wear-resistant and high temperature resistance have become the key technical indicators for the development of high-performance hard coatings.This paper introduces in detail the influence of doping IVB,VB and VIB elements on the properties of TiN and TiAlN coatings,as well as the research status of multi-layer and periodic coating technology in strengthening the properties of hard coating,and puts forward the problems to be solved according to the research status.
作者
陈强
张而耕
陈刚
林荣川
周琼
黄彪
李朝明
CHEN Qiang;ZHANG Ergeng;CHEN Gang;LIN Rongchuan;ZHOU Qiong;HUANG Biao;LI Chaoming(Shanghai Engineering Research Center of Physical Vapor Deposition(PVD)Superhard Coating and Equipment,Shanghai Institute of Technology,Shanghai 201418,China;Ningbo Branch of Chinese Academy of Ordnance Science,Ningbo 315103,China;School of Mechanical and Energy Engineering,Jimei University,Xiamen 361021,China;Shanghai Liyuan Environmental Technology Co.,Ltd,Shanghai 200241,China)
出处
《中国陶瓷》
CAS
CSCD
北大核心
2020年第11期1-9,共9页
China Ceramics
基金
上海应用技术大学中青年科技人才发展基金(ZQ2020-24)
国家自然科学基金(51971148)
上海市联盟计划(LM201904)
宁波科技创新2025重大专项(018B10047)
厦门市重大科技项目(3502Z20191022)。
关键词
物理气相沉积
多元化
多层化
硬质涂层
发展方向
Physical vapor deposition
Diversification
Multilayer
Hard coating
Development direction
作者简介
陈强(1991-),男,硕士,助理实验师。研究方向:超硬纳微米PVD涂层、材料失效分析。E-mail:chenqiang2019@yeah.net;通信作者:张而耕(1973-),男,博士后,教授。研究方向:超硬纳微米PVD涂层、机械制造、材料失效分析等。E-mail:zhangeg@yeah.net。
