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大过载真空传感器失效分析

Bigger Overload Vacuum Sensor Failure Analysis
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摘要 某型号电容式真空传感器在实际使用过程中发生失效,表现为在不同介质压力下输出几乎稳定不变。通过解剖失效传感器,排除电路故障造成的产品失效。建立传感器薄弱环节的有限元模型,分析产品满量程时的状态,并应用变分法,采用Matlab软件进行理论验证,验证有限元模型建立的正确性。采用该模型对产品进行满量程、二倍过载、四倍过载及千倍过载情况下的状态分析。产品动电极在千倍过载工况下发生塑性变形,在介质压力消失后,不能恢复初始状态,造成传感器产品发生失效。采用电镜对失效电容式真空传感器的动电极断截面进行观察,存在明显的“缩颈”现象,验证了有限元失效分析的正确性。 Some model electric capacity type vacuum type vacuum sensor has the expiration in the actual use process,and displays for outputs nearly stably under the different medium pressure invariable.The structure expiration sensor removes the product breakdown.The research establishes the finite element model of the sensor weak link,analyzes product full scale condition,and applies calculus of variations,uses the Matlab software to carry on the theory confirmation,confirms the finite element model establishment accuracy,and uses this model to carry on the full scale,two time of overloads,four time of overloads and in thousand time of overload situation state analysis to the product.The product dynamic electricity extremely in under thousand time of overload operating modes,has the plastic deformation,after medium pressure vanishing,cannot restore the original state,and creates the sensor product to have the expiration.At the same time,the electron microscope scanning is used to break the section to the expiration electric capacity type vacuum sensor to carry on the observation,has obviously“Necking”the phenomenon,and has confirmed the finite element expiration analysis accuracy.
作者 李玉欣 陈宝成 孙帅 姜晓龙 Chen Baocheng;Li Yuxin;Sun Shuai;Jiang Xiaolong(China Astronaut Research and Training Center,Beijing 100094, China;China Electronics Technology Company Group Forty-nine Research Institute,Harbin 150001, China)
出处 《黑龙江科学》 2020年第20期5-9,共5页 Heilongjiang Science
基金 国防科工局技术基础项目(JSZL2016210C005)。
关键词 真空传感器 失效分析 电容式 有限元及变分法 MATLAB Vacuum sensor Failure analysis Capacitive Finite elements and variables Matlab
作者简介 李玉欣(1985-),男,博士研究生,助理研究员;通讯作者:陈宝成(1989-),男,硕士研究生,工程师,Email:854374926@163com。
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