摘要
在固态自旋量子调控实验的微波系统中,辐射结构的传统实现方法存在制作成本较高,金属层结合力较弱等缺点。现有一种基于导电膜材料的电化学镀铜工艺方法可用于精度要求较低的辐射结构的实现。本文将该工艺应用到高频性能较好、磁场转化效率较高的共面波导辐射结构的实现中。由于共面波导辐射结构对工艺的精度要求较高,间接增加了其制作难度。本文对原有工艺方法做出了一系列改进,在完成了基于CST MWS软件的模型仿真以及工艺实现后,通过量子调控实验验证,在输入功率约为1 W的条件下,共面波导辐射结构在2.8 GHz频点处产生了强度约为6.58 Gauss的交变磁场。结果表明,本文的工艺方法可有效地实现共面波导辐射结构的制作,且性能较好。相比于传统微纳加工工艺,这种导电膜材料的电化学镀铜工艺方法缩减了步骤流程,较大幅度地降低了工艺实现的成本。
In the microwave system of quantum manipulation of solid-state spin,the implementation methods of traditional radiation structure have several disadvantages such as higher manufacturing cost and weaker bonding force of metal layers.An existing electrochemical copper plating process based on conductive films can be used to implement the radiation structure with lower accuracy.In this paper,this process is applied to the realization of coplanar waveguide with better high frequency performance and higher magnetic field conversion efficiency.The coplanar waveguide has higher requirements for the precision of the process,which means it is of diffulty to realize.We have made a series of improvements to the original process and improved the accuracy.Based on the CST MWS software we completed the model simulation and optimization of parameter.Finally,we completed the manufacture of radiation structure.It was verified through quantum manipulation experiments that Near 2.8 GHz the coplanar waveguide produced an intensity of approximately 6.58Gauss alternating magnetic field with the input power of approximately 1 W.The process method in this paper can effectively realize the fabrication of the coplanar waveguide radiating structure,and it has better performance.Compared with the traditional processing,the electrochemical copper plating process method on the conductive film reduces the step flow and greatly reduces the cost of process realization.
作者
邢腾腾
周雪莹
翟云鹏
陈冰
徐南阳
XING Teng-teng;ZHOU Xue-ying;ZHAI Yun-peng;CHEN Bing;XU Nan-yang(School of Electronic Science and Applied Physics,Hefei University of Technology,Hefei 230009,China;Ministry of Education Research Center of Applied Physics Online Cooperation,Hefei University of Technology,Hefei 230009 China)
出处
《量子光学学报》
北大核心
2020年第2期187-193,共7页
Journal of Quantum Optics
基金
国家重点研发计划(2018YFA0306600)
国家自然科学基金(11604069,61376128)
安徽省自然科学基金(1708085QA09)
量子光学与光量子器件国家重点实验室开放课题项目(KF201802)。
关键词
量子调控
共面波导
辐射结构
电化学镀铜
交变磁场
quantum manipulation
coplanar waveguide
radiation structure
electrochemical copper plating
alternating magnetic field
作者简介
邢腾腾(1994-),女,安徽亳州人,硕士研究生。E-mail:2017170837@mail.hfut.edu.cn;通信作者:徐南阳,E-mail:nyxu@hfut.edu.cn。
