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基于微压印技术的柔性传感器的设计及制备 被引量:1

Design and Preparation of Flexible Sensor Based on Micro-Imprint Technology
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摘要 柔性传感器由于具有柔性、轻薄、力学性能优良且能与弹性被检测保持同步形变等优点,被广泛应用。由于聚二甲基硅氧烷(PDMS)聚合物具有高弹性、疏水性、防水性、加工性能较好,且易与多种材质在室温下结合等特点,提出了基于微压印技术及空间限域强制组装原理(SCFNA),以PDMS为基底,碳纤维(SCF)/碳纳米管(CNT)为导电填充填料,分别制成V槽微结构和平面2种结构的导电薄膜,以面对面的接触形式,采用PDMS薄膜将其封装成聚合物基柔性传感器。研究结果表明,在0~50 N范围内,聚合物基柔性传感器输出电阻与压力具有良好的线性响应特性,灵敏度能达到-27. 2Ω/N,重复性误差小于5. 5%,对传感器施压200次后,进行测试,稳定性误差小于6%。 Flexible sensors were widely used because of their flexibility,lightness,excellent mechanical properties,and the ability to detect and maintain simultaneous deformation with elasticity.Due to its high elasticity,hydrophobicity,water repellency,and good processing properties,polydimethylsiloxane(PDMS)polymers were easy to combine with various materials at room temperature.Due to its high elasticity,hydrophobicity,water repellency,good processing property,and easy to combine with various materials at room temperature,polydimethylsiloxane(PDMS)polymer was proposed based on microimprint technology and space-limited forced assembly.The principle(SCFNA)was based on PDMS,and carbon fiber(SCF)/carbon nanotube(CNT)was used as conductive filler.V-groove microstructure and planar 2 conductive films were formed respectively.They were used in face-to-face contact mode with PDMS film.It was packaged as a flexible sensor.The results showed that at 0~50 N,the output resistance and pressure of the flexible sensor had good linear response characteristics,the sensitivity could reach-27.2Ω/N,the repeatability error was less than 5.5%,and the test was performed after 200 times of pressure on the sensor.The error was less than 6%.
作者 鲁元 吴大鸣 黄尧 李哲 代伊豪 郭阳 郜王鑫 王淑慧 LU Yuan;WU Daming;HUANG Yao;LI Zhe;DAI Yihao;GUO Yang;GAO Wangxin;WANG Shuhui(Institute of Plastic Machinery and Plastic Engineering(IPME),Beijing University of Chemical Technology,Beijing 100029,China;Engineering Research Center for Polymer Processing Equipment,Ministry of Education,Beijing 100029,China)
出处 《塑料》 CAS CSCD 北大核心 2020年第3期70-74,共5页 Plastics
关键词 聚合物基柔性传感器 强制组装 PDMS 线性变化 微结构 flexible sensor forced assembly PDMS linear change microstructure
作者简介 鲁元(1994-),男,在读硕士研究生;通信作者:吴大鸣(1957-),男,教授,主要从事聚合物微纳成型原理及装备等方面的研究。E-mail:wudaming@vip.163.com。
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