摘要
目前对β-Zn4Sb3热电材料制备与掺杂的研究报道不多。研究了β-Zn4Sb3热电材料的磁控溅射并对其实施掺杂的过程,并分析了不同Ag射频功率下得到的β-Zn4Sb3热电涂层的膜层组织及其热电性能。测试结果表明:经过磁控溅射处理后试样表面形貌优化,形成了具有致密结构的表面。所有掺入Ag之后的β-Zn4Sb3涂层都比原始β-Zn4Sb3涂层达到了更高的电导率,而且电导率与Ag射频功率之间呈现正相关变化规律。没有掺入Ag的涂层具有最大的Seebeck系数,当Ag射频功率提高后试样Seebeck系数发生了降低的现象。掺入Ag之后的热电涂层试样达到了更大的功率因子;当测试温度上升后,掺入Ag的β-Zn4Sb3涂层则发生功率因子先升高后降低的变化现象。
The process of magnetron sputtering and doping ofβ-Zn4Sb3 thermoelectric materials was studied,and the film structure and thermoelectric properties ofβ-Zn4Sb3 thermoelectric coating obtained under different Ag radio frequency(RF)power levels were analyzed.Results showed that the surface morphology of the samples was optimized by magnetron sputtering,and a compact surface formed under the optimized conditions.Allβ-Zn4Sb3 coatings doped with Ag achieved higher conductivity than the primitiveβ-Zn4Sb3 coating,and there was a positive correlation between the conductivity and Ag RF power.The coating without Ag doping had the largest Seebeck coefficient,and the Seebeck coefficient decreased with the increase of Ag RF power.Ag-doped thermoelectric coating samples achieved higher power factors.When the test temperature rose,the power factor of Ag-dopedβ-Zn4Sb3 coatings first increased and then decreased.
作者
王忠利
琚爱云
WANG Zhong-li;JU Ai-yun(School of Electrical Engineering,Zhengzhou University of Science and Technology,Zhengzhou 450064,China;Department of Mechanical and Electrical Engineering,Zhengzhou Vocational College of Science and Technology,Zhengzhou 451150,China)
出处
《材料保护》
CAS
CSCD
北大核心
2020年第2期79-82,共4页
Materials Protection
关键词
β-Zn4Sb3热电涂层
磁控溅射
膜层结构
热电性能
Zn4Sb3 thermoelectric coating
magnetron sputtering
coating structure
thermoelectric performance
作者简介
通信作者:王忠利(1980-),硕士,副教授,主要从事电气工程等研究,E-mail:anggaiduannao@126.com。
