摘要
文章介绍了用平面平晶校准量块工作面平面度的方法,根据校准原理提出局部平面度校准来提高被测量面平面度校准的精度,并对平面平晶的局部校准提出了新的建议。
This paper introduces the method of calibrating the flatness of the working face of the Gauge block with Planar optical flat,proposes the local flatness calibration according to the calibration principle to improve the accuracy of the flatness calibration of the measured surface,and puts forward a new Suggestion for the local flatness calibration of the Planar optical flat.
出处
《计量与测试技术》
2020年第4期86-88,共3页
Metrology & Measurement Technique
关键词
平面平晶
等厚干渉
局部平面度校准
planar optical flat
isopach interference
local flatness calibration
作者简介
王海涟,女,工程师,从事计量检测工作。
