摘要
采用微纳加工工艺制备了硅基微机电(MEMS)超高灵敏度加速度计,并针对超高灵敏度MEMS加速度计进行了结构设计及仿真。通过独特自主的体硅一体化刻穿工艺加工出MEMS加速度计敏感结构,测得MEMS加速度计噪声谱密度在1 Hz处为0.3 ng/Hz1/2,46 h偏值稳定性为740 ng,量程1 mg,带宽10 Hz,抗随机振动可达8 g(RMS),抗冲击过载1000 g。相比于传统的高精度加速度计,本文提出的基于微纳加工工艺的硅基超高灵敏度MEMS加速度计体积小、重量轻、环境适应性强,具有可批量化生产和成本低的优势,有望用于对灵敏度有较高要求的微震测量、微重力环境应用、空间探测等领域。
An ultra-high sensitivity Micro-Electro Mechanical-System(MEMS)accelerometer was developed by micro-fabrication technology.The structural design and simulation of the proposed MEMS accelerometer was conducted.The through-silicon-etching process was used to fabricate the sensing element of the MEMS accelerometer.The performance of the proposed MEMS accelerometer is evaluated with a noise floor(or the sensitivity)of 0.3 ng/Hz1/2 at 1 Hz,stability of 740 ng for 46 hours,a measurement range of 1 mg,a bandwidth of 10 Hz.In addition,the proposed MEMS accelerometer can survive under a random vibration level of up to 8 g and an impact of 1000 g.Compared with the traditional accelerometers,the silicon-based ultra-high sensitivity MEMS accelerometer based on micro-fabrication technology has advantages of small-size,light-weight,environmentally adaptable and low-cost.It is expected to be applied in micro-seismic measurement,microgravity environment,space exploration and other applications.
作者
王秋
刘骅锋
许强伟
宋萧萧
严世涛
涂良成
WANG Qiu;LIU Huafeng;XU Qiangwei;SONG Xiaoxiao;YAN Shitao;TU Liangcheng(Key Laboratory of Gravity Navigation,Ministry of Education,Center for gravitational experiment,School of Physics,Huazhong University of Science and Technology,Wuhan 430074,China)
出处
《中国惯性技术学报》
EI
CSCD
北大核心
2020年第1期100-105,共6页
Journal of Chinese Inertial Technology
基金
国家重点研发计划(2018YFC0603301,2017YFC061603)
湖北省自然科学基金(2019CFB108)
装发预研领域基金重点项目(61405170105)
中国航天科技集团创新基金重点项目(CAST-BISEE2017-019)
国家自然科学基金(61306095,61574067)
华中科技大学重点创新团队基金(2016JCTD102)。
关键词
超高灵敏度加速度计
微机电系统
稳定性
噪声评估
环境适应性
ultra-high sensitivity accelerometer
Micro-Electro Mechanical-System
stability
noise
environmental adaptability
作者简介
王秋(1993—),女,博士研究生,从事高精度MEMS惯性器件研究。E-mail:wangqiu@hust.edu.cn;联系人:刘骅锋(1987—),男,副研究员,博士生导师。E-mail:huafengliu@hust.edu.cn。
