摘要
目的改善GH4169合金的表面性能,制备摩擦学性能优良的复合薄膜。方法采用离子源辅助直流磁控溅射技术制备NiCrAlY/Ag复合薄膜,研究沉积温度分别为60、120、180℃对薄膜结构和性能的影响。利用能谱仪(EDS)、扫描电子显微镜(SEM)、原子力显微镜(AFM)、X射线衍射仪(XRD)进行薄膜元素成分含量、表面形貌、截面形貌、粗糙度和相结构的检测。采用纳米压痕仪、划痕法、球-盘式摩擦磨损试验机对薄膜的硬度、结合力、摩擦磨损性能进行分析。结果NiCrAlY/Ag复合薄膜的表面致密度、晶粒尺寸以及表面粗糙度随沉积温度的升高而增大,物相组成主要为Ni3Al、Ag和Cr,薄膜的硬度在5.67~6.41GPa之间。复合薄膜的膜/基结合力随沉积温度的增加而降低,其中沉积温度为60℃时的膜基结合力最佳(33.1N),并且在此沉积温度下的复合薄膜具有最佳的室温摩擦学性能,其平均摩擦系数为0.24,磨损率为3.52×10–5 mm^3/(N·m),磨损机制为氧化磨损和磨粒磨损。结论沉积温度对NiCrAlY/Ag复合薄膜的结构性能影响显著,当沉积温度为60℃时,薄膜综合性能最好。
The work aims to prepare a composite film with good tribological properties to improve the surface properties of GH4169 alloy.NiCrAlY/Ag composite films was prepared by ion source assisted DC magnetron sputtering at 60℃,120℃,and 180℃.Effects of deposition temperature on the structure and properties of films were investigated.The elemental composition,surface morphologies,cross-sectional morphologies,surface roughness,and phase structure of the films were analyzed with energy dispersive spectroscopy(EDS),scanning electron microscopy(SEM),atomic force microscopy(AFM)and X-ray diffraction(XRD).The hardness,adhesion strength,friction and wear properties of the films were analyzed with nanoindentation tester,scratch test and ball-on-disk friction and wear tester.With the increase of deposition temperature,the surface density,grain size and surface roughness of NiCrAlY/Ag composite films increased,phase structures of the films were mainly Ni3 Al,Ag and Cr.The hardness of the films was slightly different at the range of 5.67~6.41 GPa.With the increase of deposition temperature,the adhesion strength of the composite films decreased.The samples deposited at 60℃ showed the best adhesion strength of 33.1 N,as well as good tribological properties with friction coefficient of 0.24 and wear rate of 3.52×10–5 mm^3/(N·m).The wear mechanism was oxidative wear and abrasive wear.Thus the deposition temperature has a significant effect on the structural and properties of NiCrAlY/Ag composite films.The films deposited at 60℃shows the best comprehensive performance.
作者
吴易谦
韦春贝
代明江
匡同春
刘敏
林松盛
石倩
WU Yi-qian;WEI Chun-bei;DAI Ming-jiang;KUANG Tong-chun;LIU Min;LIN Song-sheng;SHI Qian(School of Material Science and Engineering,South China University of Technology,Guangzhou 510640,China;National Engineering Laboratory for Modem Materials Surface Engineering Technology,Guangdong Institute of New Materials,Guangzhou 510651,China;Key Lab of Guangdong for Modem Surface Engineering Technology,Guangdong Institute of New Materials,Guangzhou 510651,China)
出处
《表面技术》
EI
CAS
CSCD
北大核心
2019年第12期211-217,共7页
Surface Technology
基金
中国航发创新基金项目(ZGHF-ZL-2017-C068)
广东省科学院项目(2018GDASCX-0111,2019GDASYL-0302012,2017GDASCX-0111)
广东省科技计划项目(2017A070701027,2014B070705007)~~
作者简介
吴易谦(1994—),男,硕士研究生,主要研究方向为材料表面工程;通讯作者:代明江(1964—),男,教授级高级工程师,主要研究方向为表面工程。邮箱:daimingjiang@gdinm.com。
