摘要
为了提高汽车用316L不锈钢表面磁控溅射TaN涂层的耐磨性能,研究分析了不同N2流量下TaN涂层的组织和性能。结果表明:通入的N2流量很小时,形成的TaN涂层表面相对粗糙,形成了“山脊状”的团聚颗粒;N2流量为5 mL/s时,形成的TaN涂层表面相对平坦,具有“菜花状”的小尺寸团聚晶簇。随着N2流量的上升,将使吸附原子的活性减小,由于(110)晶面属于bcc结构的密排面,对应的能量最低,这使得(110)晶面可以包含更多低能量原子。当N2流量升高后,涂层内N掺杂浓度更高,使得涂层的硬度与弹性模量都增大,涂层获得更优的耐磨性。通入N2后,所有TaN涂层比不通入N2得到的涂层的磨损率明显减小,磁控溅射过程掺杂N元素后涂层的耐磨性更佳。
In order to improve the wear resistance of TaN coating prepared by the magnetron sputtering on the surface of 316L stainless steel used in automobiles,the microstructure and properties of TaN coating under different N2 flow rates were studied.Reshowed that when the N2 flow rate was very small,the TaN coating formed a relatively rough surface structure and formed“ridge”aggregates.Under 5 mL/s of N2 flow rate,the prepared TaN coating formed a relatively flat surface with“cauliflower”small-size agglomerated crystal clusters.With the increase of N2 flow rate,the activity of adsorbed atoms decreased.Because the(110)crystal surface belonged to the dense row surface of bcc structure,the corresponding energy was the minimum,which enabled(110)crystal surface to accommodate more low-energy atoms.When the N2 flow rate increased,the coating reached a higher concentration of N doping,and the hardness and elastic modulus of the coating were enhanced,leading to better wear resistance of coatings.After N2 injection,the wear rate of all TaN coatings was significantly reduced,indicating that the coating achieved higher wear resistance after doping N elements in the magnetron sputtering process.
作者
李红英
LI Hong-ying(School of Automotive Engineering,Jiangxi University of Technology,Nanchang 330098,China)
出处
《材料保护》
CAS
CSCD
北大核心
2019年第11期72-76,共5页
Materials Protection
基金
江西省高等学校教学改革研究省级立项课题(JXJG-17-24-3)资助
关键词
TaN涂层
磁控溅射
N2流量
组织
磨损性能
TaN coating
magnetron sputtering
N2 flow
microstructure
wear resistance
作者简介
通信作者:李红英(1979-),讲师,主要从事汽车设计,电话:13835269685,E-mail:shuren954hn@126.com。
