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一种基于Guard技术的皮安级电流校准方法 被引量:3

A current calibration method of pA-level based on Guard technique
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摘要 针对具有Guard保护端的源表类仪器皮安级电流不易计量的现状,采用取样电阻法的间接测量方案,完成微小电流的有效校准。为解决方案中高源内阻电压精确测量的难题,对源表类仪器广泛采用的Guard保护技术原理进行分析,建立高源内阻电压精确提取模型。研制低电流适配器,组建校准系统,编写自动校准程序,并完成低至1 pA的微小电流校准实验。数据表明:实验结果同上级校准值一致性良好,校准方法能够对具备Guard端口的源表类仪器实现微小电流的有效校准。 Considering that pA-level current outputted by source-meter instruments is difficult to metering,an indirect calibration scheme based on sample resistance method was conducted,which achieves effective calibration of micro-current.In order to solve the problem about measuring the voltage on high value resistance,Guard technique which was widely used by source-meter instruments is researched,and exact model to extract the voltage was constituted.A micro-current adaptor was made,calibration system was constructed,automatic calibration program was written,and calibrating experiment of micro-current as low as 1 pA was conducted.Experimental data is coincident with calibrated value given by superior instrument,indicating that this method could realize the micro-current calibration of source-meter instruments with Guard ports efficiently.
作者 李灏 郑世棋 乔玉娥 丁立强 梁法国 LI Hao;ZHENG Shiqi;QIAO Yu’e;DING Liqiang;LIANG Faguo(The 13th Research Institute,CETC,Shijiazhuang 050051,China)
出处 《中国测试》 CAS 北大核心 2019年第11期45-50,共6页 China Measurement & Test
关键词 源表 微小电流校准 取样电阻 Guard技术 适配器 source-meter micro-current calibration sample resistance Guard technique adaptor
作者简介 李灏(1989-),男,河北石家庄市人,助理工程师,硕士,主要从事电磁计量测试工作。
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