摘要
为提高多自由度微机电陀螺的灵敏度及带宽的鲁棒性,提出了一种依据特征分析确定约束条件的新方法,即从参数限定的角度对结构参数对微机电陀螺动态性能的影响特征进行提取,以此为依据确定优化设计的约束条件,结合响应面法对多自由度微机电陀螺的灵敏度及带宽进行了优化设计。优化后灵敏度最高提升了19%,相应的带宽也提升了11%;带宽最高提升了28%,相应的灵敏度则提升了16%。结果表明了该优化方法的有效性,同时仿真分析结果也验证了优化分析结果的可靠性。
In order to improve the sensitivity and bandwidth robustness of multi-DOF gyroscope, a new method for determining constraints based on feature analysis is proposed. The method extracts the structural parameters’ influence on the dynamic performance of the micro-gyroscope from the perspective of parameter definition to determine the constraints of the optimal design. The sensitivity and bandwidth of multi-DOF gyroscope are optimized by feature extraction and the Response Surface Method(RSM). The optimized sensitivity is increased by up to 19%, the corresponding bandwidth is increased by 11%. The maximum bandwidth is increased by 28%, and the corresponding sensitivity is increased by 16%. The results show the effectiveness of the proposed optimization method, and the simulation analysis results also verify the reliability of the optimization analysis results.
作者
郝淑英
孟思
张琪昌
冯晶晶
陈炜
HAO Shuying;MENG Si;ZHANG Qichang;FENG Jingjing;CHEN Wei(Tianjin Key Laboratory of Advanced Electromechanical System Design and Intelligent Control,Tianjin University of Technology,Tianjin 300384,China;National experimental teaching demonstration center of mechanical and electrical engineering,Tianjin University of Technology,Tianjin 300384,China;Tianjin Key Laboratory of Nonlinear Dynamics and Control,Tianjin University,Tianjin 300072,China)
出处
《中国惯性技术学报》
EI
CSCD
北大核心
2019年第1期113-120,共8页
Journal of Chinese Inertial Technology
基金
国家自然科学基金(11872044)
国家重点研发计划(2018YFB0106200)
国家自然科学青年基金(11602169)
关键词
多自由度微机电陀螺
灵敏度
带宽
特征提取
响应面法
multi-DOF vibratory gyroscopes
sensitivity
bandwidth
dynamic characteristic extraction
response surface methodology
作者简介
郝淑英(1962-),女,教授,硕士生导师,从事MEMS微结构动力学特性的研究、线性及非线性动力学理论及应用以及非线性有限元分析方法及应用方面的研究。E-mail:syhao@tju.edu.cn;陈炜(1973-),女,副教授,硕士生导师,从事机械系统动力学与控制的研究。E-mail:chenwynn@163.com.