摘要
提出了一种制作微通道型固定流导元件的方法,即基于硅硅直接键合将刻蚀深度约为1pim的沟槽结构密封成微通道,利用钢熔融封接技术使其与金属法兰结合构成通道型固定流导组件,使用氮质谱检漏仪对其漏率测试。测量结果表明,固定流导元件的流导测量值与理论计算值接近,相对误差不超过22.2%。氮气作为测量气体时,固定流导元件能够从高真空到30000Pa压强下实现分子流状态,即流导恒定。
A novel standard-leak with controllable molecular flow conductance was developed, comprising two glycol bonded Si-chips with gas inlet/outlet holes:one has surface micro-fluidic channels (.1 jxm deep) fabricated by lithography and the other serves as the top丒cover. The conductance can be well-controlled by adjusting the size/number of micro-channels. The constant conductance via the novel Si-based standard-leak, installed between two F35 flanges and sealed with indium gasket, was characterized with helium leak detector, scanning electron microscopy and atomic force microscopy. The measured results show that the new Si-based standard-leak is capable of providing a constant conduct丒 ance of helium molecular flow in the up-stream pressure range from high vacuum up to 30000 Pa. The measured and cab culated results were found to be in fairly good agreement with a relative error of approximately 22. 2%.
作者
姜彪
于振华
甘婧
王永健
孟冬辉
李明利
孙立臣
王旭迪
Jiang Biao;Yu Zhenhua;Gan Jing;Wang Yongjian;Meng Donghui;Li Mingli;Sun Lichen;Wang Xudi(Hefei University of Technology, Hefei 230009, China;Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2019年第4期345-349,共5页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金面上项目(项目编号:No.61574053,No.61871172)
关键词
固定流导元件
微通道
硅直接键合
铟封接
分子流
Constant conductance component
Microchannels
Silicon directly bonding
Indium sealing
Molecular flow
作者简介
联系人:王旭迪,E-mail:wxudi@hfut.edu.cn.
