摘要
运用光波导的模式理论设计了多层集成光波导干涉芯片,对芯片的光波导结构和材料参数进行优化,并制作了集成干涉芯片.借助集成芯片的波导双通道,通过干涉获得了高对比度的远场干涉条纹.在实验误差范围内,当外界环境条件发生微小变化时,干涉条纹发生移动,符合杨氏双缝干涉理论的预期.芯片对水汽、酒精的探测灵敏度约为100ppm,并具有足够的温度稳定性.该集成干涉芯片具有低浓度环境气体检测的应用前景,可为集成高灵敏气体传感器的开发提供发展平台.
An optical waveguide interference chip with a multi-layer planar structure was designed,and the integrated chip was fabricated successfully after its structure and the material parameters were optimized using the mode theory of optical waveguide.Far-field interference fringes with a high contrast are achieved by the dual-guide waveguide structure inside the chip.Within an experimental error,experiments demonstrate that the interference fringe pattern generated from the integrated chip can be explained and predicted by Young′s double-slit theory,and the fringe moves under a minor environment change.For humidity and alcohol gas,the detection sensitivity of the chip can reach about100ppm level with enough temperature stability during estimate test,which demonstrates its potential applications in sensing environment gas with low concentration and provides a new platform to develop an integrated gas sensor with high sensitivity.
作者
张何丽
姜欢
张冰
任一涛
ZHANG He-li;JIANG Huan;ZHANG Bing;REN Yi-tao(Physics Department, School of Physics and Astronomy, Yunnan University, Kunming 650091, China)
出处
《光子学报》
EI
CAS
CSCD
北大核心
2019年第1期185-192,共8页
Acta Photonica Sinica
基金
国家自然科学基金(No.61465015)~~
关键词
平面光波导
干涉条纹
杨氏双缝
集成光学
玻璃
Planar waveguide
Interference fringe
Young′s double-slit
Integrated optics
Glass
作者简介
第一作者:张何丽(1995-),女,硕士研究生,主要研究方向为光电子与光通信器件.Email:zhanghelisdy@126.com;通讯作者:任一涛(1960-),导师,男,教授,博士,主要研究方向为光波导理论与器件,光传感器等.Email:ytren@ynu.edu.cn
