摘要
本文基于穿孔板静电微执行器的基本模型,在忽略和考虑压膜阻尼效应的两种情况下,采用能量法推导了静电微执行器的动态Pull-in参数公式,并结合ANSYS软件得到动态Pull-in参数的仿真值。通过对比两种情况下的Pull-in电压和Pull-in位移,得出了阻尼比变化对动态Pull-in参数的影响。结果表明,压膜阻尼效应会增大Pull-in电压、减小Pull-in位移;当阻尼比大于0.4,动态Pull-in电压值将与静态Pull-in电压值一致;当阻尼比大于0.5,动态Pull-in位移值将与静态Pull-in位移值一致。
Based on the model of perforated-plate electrostatic micro-actuator,energy method is used to derive its dynamic Pull-in parameter formula without and with considering squeeze damping effect.Meanwhile,ANSYS is also used to get the simulation value of dynamic Pull-in parameter.By comparing the Pull-in voltages and Pull-in displacements under the two circumstances mentioned above,the effects of damping ratio on Pull-in parameter can be obtained.The results show that,with the existence of squeeze damping effect,Pull-in voltage will increase and Pull-in displacement will decrease.When the damping ratio is greater than 0.4,the dynamic Pull-in voltage value will be consistent with the static Pull-in voltage value;when the damping ratio is greater than 0.5,the dynamic Pull-in displacement value will be consistent with the static Pull-in displacement value.
作者
季莅莅
方玉明
孜乃提古丽.布尔汉
戚举
艾昕晨
JI Lili;FANG Yuming;Zinnetgvl Burhan;QI Ju;AI Xinchen(College of Electronic and Optical Engineering Nanjing University of Posts and Telecommunications,Nanjing 210023,China)
出处
《传感技术学报》
CAS
CSCD
北大核心
2018年第9期1311-1315,共5页
Chinese Journal of Sensors and Actuators
基金
江苏省研究生科研与实践创新计划项目(SJCX17_0231
KYCX18_0879)
南京邮电大学大学生创新训练计划项目(XZD2018041)
作者简介
季莅莅(1993-),女,汉族,江苏泰兴人,硕士研究生,研究方向为微机电系统,504863018@qq.com;方玉明(1975-),女,1996年于东南大学获得学士学位,1999年于东南大学获得硕士学位,2008年于东南大学获得博士学位,现为南京邮电大学教授、硕士生导师,主要研究方向为微电子学及MEMS系统研究,fangym@njupt.edu.cn。
