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氩氧混合气体及纯氧气氛下脉冲激光沉积法制备YBa_2Cu_3O_(7-δ)超导薄膜的研究 被引量:1

Investigation of YBa_2Cu_3O_(7-δ) Superconducting Films Prepared in Argon Oxygen Mixed Atmosphere and Pure Oxygen Atmosphere by Pulsed Laser Deposition Method
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摘要 利用脉冲激光沉积法(PLD)在保证其它实验参数不变的情况下,分别在Ar∶O2为3∶1和纯O2的气氛中,在(001)SrTiO_3(STO)基片上制备了外延的高质量YBa2Cu3O7-δ(YBCO)超导薄膜。X射线衍射表明在氩氧混合气体下制备的YBCO薄膜具有更好的结晶质量。扫描电子显微镜测量结果发现:相比于纯O2氛围下制备的YBCO样品,在氩氧混合氛围中制备的薄膜表面具有较小颗粒密度。通过四引线法获得YBCO薄膜的归一化电阻(R/R100K)随温度(T)的变化关系发现,虽然对应不同氛围制备的YBCO薄膜的零电阻转变温度均为90.0 K,但是,对应氩氧混合气体的YBCO具有更小的正常态电阻。研究结果表明脉冲激光制备YBCO的过程中,引入氩气可以改善YBCO薄膜的结构和性能。 High quality YBa2Cu307_δ(YBCO)films were prepared on the SrTi03(001)substrate by the pulsed laser deposition method(PLD),samples were prepared at the same condition and the atmosphere during the experiment is in Ar and 02 with radio of 3:1 and pure 02,respectively.X ray diffraction shows that the YBCO films prepared under argon oxygen mixed gas have better crystallization quality.The morphology of the surface of the film was characterized by scanning electron microscope.It is found that the density of the YBCO particles which prepared in Ar and 02 is reduced.The relation of normalized resistance(R/R 100K)with temperature(T)of YBCO film prepared in Ar and 02 with radio of 3:1 and pure 02 was measured by four-probe method.Although the zero resistance transition temperature of YBCO films prepared in different atmospheres is 90.0 K,the YBCO film prepared in Ar and 02 atmosphere has smaller normal state resistance.The results show that the introduction of argon gas in the preparation of YBCO can improve the structure and properties of the YBCO film.
作者 张宇生 代秀红 刘保亭 娄建忠 ZHANG Yu-sheng;DAI Xiu-hong;LIU Bao-ting;LOU Jian-zhong(College of Electronic Information Engineering,Hebei University,Baoding 071002,China;College of Physics Science and Technology,Hebei University,Baoding 071002,China)
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2018年第3期534-538,共5页 Journal of Synthetic Crystals
基金 国家自然科学基金(11374086) 河北省自然科学基金(E2014201188 A2018201168)
关键词 YBa2Cu3O7-δ薄膜 氩气 表面形貌 超导性 YBa2Cu307_δthin film Ar surface topography superconductivity
作者简介 张宇生(1992-),男,河北省人,硕士研究生。;通讯作者:娄建忠,教授。
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