摘要
对硅/玻璃阳极键合进行了实验技术研究,阐述了实验设计思路;确定了实验的内容和方法,据此研制出能直观显示硅/玻璃界面键合情况以及键合电流-时间曲线的多功能键合实验仪。通过键合操作、现象观察和深入分析,使学生更加深入了解键合机理、掌握影响键合效果与效率的主要因素。该实验技术有助于提升学生的动手能力、分析能力以及综合素质。
The research on experimental technology for the silicon and glass anodic bonding is carried out,the design idea of the experiment is expounded,and the content and method of the experiment are determined.Based on this,a multifunctional bonding experimental instrument which can directly display the silicon and glass interface bonding and the bonding currenttime curve is developed.Through the bonding operation,phenomenon observation and indepth analysis,students can better understand the bonding mechanism and master the main factors that influence the bonding effect and efficiency ratio.This experimental technology is helpful to improve students’handson ability,analytical ability and comprehensive quality.
作者
王蔚
封迪
田丽
Wang Wei;Feng Di;Tian Li(School of Astronautics, Harbin Institute of Technology, Harbin 150001, China)
出处
《实验技术与管理》
CAS
北大核心
2017年第11期35-38,90,共5页
Experimental Technology and Management
基金
黑龙江省自然科学基金项目(E200917)
哈尔滨工业大学教学实验室建设项目
关键词
阳极键合
教学实验
键合仪
电流监测
anodic bonding
teaching experiment
bonding instrument
current detection
作者简介
王蔚（1960— ）女，上海，博士，教授级高级工程师，哈工大微电子技术实验室主任，从事微电子科学与技术领域的教学与科研工作.E-mail：wangweihit@hit.edu.cn
