摘要
针对已有悬浮抛光装置研磨不平稳从而引起的加工表面质量不高问题,对液动压悬浮抛光方法、声悬浮抛光方法和磨料水射流抛光方法等表面超光滑加工技术进行了分析研究,提出了一种基于气压浮动的防碰撞悬浮抛光方法。根据静压气体润滑原理,建立了防碰撞装置的径向承载力计算模型,通过提高侧向承载力与刚度,同时减小泄气量,使径向承载力可以克服偏心力,从而促使防碰撞装置自动归位;利用Fluent软件建立了防碰撞装置流体仿真计算模型,计算得到了防碰撞装置沿轴向的压力分布情况。研究结果表明:基于气压浮动的防碰撞悬浮基盘抛光方法可以提高表面抛光质量;仿真计算结果和理论计算结果偏差小于6%,防碰撞装置和基盘的偏心率小于0. 2,防碰撞装置具有良好效果。
Aiming at the low quality of the target surface made by the unstable polishing process with current float polishing device, the hydrodynamic suspension polishing method, acoustic suspension polishing, abrasive jet polishing, etc. of the machining mechanism of ultra-smooth surface technology were analyzed, an anti-collision float polishing method was proposed according to the air floating theory. The model to predict the radial bearing capacity of the anti-collision device was developed based on aerostatic lubrication principles. By improving the radial bearing capacity and stiffness, and reducing the air leakage, such that the radial bearing capacity could be used to overcome the eccentric force, and then the anti-collision device turned back automatically. In order to analyze the distribution of the pressure along the axial direction of the anti-collision device, the flow model of the anti-collision device was developed with Fluent software. The results indicate that the anti-collision float polishing method can improve the polishing quality, the deviation between the simulation and theoretical calculation is within 6%, and the eccentricity between the anti-collision device and the base plate is less than 0.2. The anti-collision device has good effect.
作者
袁智敏
计时鸣
张利
单晓杭
YUAN Zhi-min;JI Shi-ming;ZHANG Li;SHAN Xiao-hang(Key Laboratory of Special Purpose Equipment and Advanced Processing Technology,Ministry of Education,Zhejiang University of Technology,Hangzhou 310014,China)
出处
《机电工程》
CAS
北大核心
2018年第11期1195-1199,共5页
Journal of Mechanical & Electrical Engineering
基金
国家自然科学基金资助项目(51575494
51575493)
作者简介
袁智敏（1992-），男，浙江绍兴人，硕士研究生，主要从事精密、超精密加工方面的研究。E-mail：389902779@qq.com;通信联系人： 计时鸣，男，博士，博士生导师。E-mail：zhanglihz@163.com
