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基于微机械摆的全方位倾角传感器设计 被引量:3

Design of omni-directional tilt sensor based on micromechanical pendulum
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摘要 微机械摆倾角传感器的内部敏感元件为"三明治"结构,当其随载体发生倾斜运动时,由于受到哥氏力效应的影响,中间层动极板以扭转梁为中心轴与上下层固定极板间距发生改变,从而引起电容发生改变。理想情况下其倾角检测的最大范围为±90°。在微机械摆倾角传感器的基础上,利用其输出信号特性,利用ADuc812单片机作为微控制器对倾角信号进行采样、AD转换,并研究了数字信号滤波的算法,采用中位值平均滤波和递推平均滤波的方法去除异常干扰噪声,优化平滑输出数字倾角信号对其信号进行解算实现单轴全方位(0~360°)姿态解算。 The inner sensitive element of the micromechanical pendulum tilt sensor is of a"sandwich"structure. When it is tilted with the carrier,influenced by the Coriolis force effect,the distance between the middle layer around the center axis and the fixed plate of the upper and lower layers is changed,which causes the change of the electric capacity. Ideally,the maximum angle of inclination detection is ± 90 degrees. On the basis of the micromechanical pendulum tilt sensor,using its output signal characteristics,the ADuc812 single chip microcomputer is applied as a microcontroller to sample and AD conversion of the dip signal,and the algorithm of digital signal filtering is studied. The method of median filtering and recursive average filtering are used to remove abnormal interference noise and optimize the leveling. Sliding output digital inclination signal is optimized to calculate its signal to achieve uniaxial omni-directional( 0 ~ 360 degree) attitude calculation.
作者 胡腾飞 张伟 HU Tengfei;ZHANG Wei(Sensing Technology Center,Beijing Information Science & Technology University,Beijing 100192,China)
出处 《北京信息科技大学学报(自然科学版)》 2018年第4期92-96,共5页 Journal of Beijing Information Science and Technology University
关键词 倾角测量 全方位 微机械硅摆 ADUC812单片机 tilt measurement full range micromachined silicon pendulum ADucS12 microcontroller
作者简介 胡腾飞,男,硕士研究生;;通讯作者:张伟,男,副研究员。
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