摘要
为满足碳化硅材料的磨削要求,根据碳化硅材料的性能,研究了磨削工艺,并针对磨削中出现的技术难题,采取了油石在线修整的磨削工艺措施;试验结果表明使用树脂结合剂的金刚石砂轮和油石在线修整的磨削工艺,选择适合的磨削工艺参数可以达到对碳化硅材料磨削工艺要求,并取得了较好的实验效果。
In order to meet the grinding requirements of silicon carbide materials,the performance of silicon carbide material is analyzed first,and the grinding process is studied according to the properties of the material. Finally,aiming at the problems in grinding,we take the grinding process measures of oil stone online grinding. The experimental results show that the grinding process of diamond grinding wheel and oil stone online dressing with resin bond can achieve the technological requirements of grinding silicon carbide material and achieve better experimental results.
作者
刘国敬
刘宇光
贺东葛
刘婷婷
LIU Guojing;LIU Yuguang;HE Dongge;LIU Tingting(The 45th Research Institute of CETC, Beijing 100176, China)
出处
《电子工业专用设备》
2018年第2期34-35,73,共3页
Equipment for Electronic Products Manufacturing
关键词
碳化硅材料
磨削技术
油石在线修整
Silicon carbide material
Grinding process
Oil stone online grinding
作者简介
刘国敬（1981-），女，山东潍坊人，工学硕士，毕业于电子科技大学，电气工程师，现就职于中国电子科技集团公司第四十五研究所，主要从事半导体设备的电控设计工作。
